Peripheral switches for MEMS display test
First Claim
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1. A MEMS (Microelectromechanical system) device comprising:
- an array of MEMS elements, the array comprising a plurality of addressing lines;
at least one connection pad; and
a plurality of switches configured to selectively connect one or more of the addressing lines to the at least one connection pad.
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Abstract
A MEMS (Microelectromechanical system) device is described. The device includes an array of MEMS elements with addressing lines, one or more connection pads, and switches configured to selectively connect two or more of the addressing lines to the connection pads. The arrangement is particularly advantageous for testing the array, because test signals may be applied to the connection pads and selectively applied to separate groups of one or more MEMS elements.
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Citations
23 Claims
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1. A MEMS (Microelectromechanical system) device comprising:
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an array of MEMS elements, the array comprising a plurality of addressing lines; at least one connection pad; and a plurality of switches configured to selectively connect one or more of the addressing lines to the at least one connection pad. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A method of testing a MEMS (Microelectromechanical system) device comprising an array of MEMS elements, wherein the array comprises a plurality of addressing lines, a connection pad, and a plurality of switches configured to selectively connect the plurality of addressing lines to the connection pad, the method comprising:
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providing an electrical signal to the switches so as to configure the switches to electrically connect the plurality of addressing lines to the connection pad; and providing an electrical signal to the connection pad so as to actuate one or more of the MEMS elements. - View Dependent Claims (16, 17, 18)
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19. A method of operating a MEMS (Microelectromechanical system) device comprising an array of MEMS elements, wherein the array comprises a plurality of addressing lines, a connection pad, and a plurality of switches configured to selectively connect the plurality of addressing lines to the connection pad, the method comprising:
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providing an electrical signal to the switches so as to configure the switches to electrically disconnect the plurality of addressing lines from the connection pad; and providing one or more electrical signals to the plurality of addressing lines so as to operate the MEMS elements. - View Dependent Claims (20)
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21. A MEMS (Michroelectromechanical system) device comprising:
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an array of MEMS elements, the array comprising a plurality of addressing lines; a connection pad; and means for selectively connecting two or more of the addressing lines to the connection pad. - View Dependent Claims (22, 23)
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Specification