×

PRESSURE TRANSDUCER DIAPHRAGM AND METHOD OF MAKING SAME

  • US 20080160659A1
  • Filed: 12/29/2006
  • Published: 07/03/2008
  • Est. Priority Date: 12/29/2006
  • Status: Abandoned Application
First Claim
Patent Images

1. A method of making a pressure transducer diaphragm, the method comprising:

  • etching one or more trenches in a first surface of a first substrate;

    rendering the trench etch resistant; and

    etching a cavity in a second opposite surface of the first substrate defining a diaphragm supported by a frame with one or more hollow bosses stiffening the membrane.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×