HIGH SENSITIVITY ACOUSTIC WAVE MICROSENSORS BASED ON STRESS EFFECTS
First Claim
1. A system for acoustic sensing, comprising:
- a bridge structure coupled to a substrate about at least two sides of said bridge, wherein said bridge includes a piezoelectric section and has at least one acoustic wave device (AWD) proximate a portion of said bridge, said AWD includes an active acoustic region; and
wherein a perturbation of said bridge produces stress effects measurable by said AWD.
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Accused Products
Abstract
Acoustic sensing utilizing a bridge structure coupled about a portion of at least two sides of said bridge to a base substrate, wherein said bridge includes a piezoelectric section and has at least one active acoustic region proximate said bridge. A sensing material is disposed on at least a portion of at least one surface of the bridge, wherein the bridge produces stress effects measurable by an acoustic wave device located in the active acoustic region. According to one embodiment, the stress effects are measured by an acoustic wave device to sense a target matter. As target molecules accumulate on a sensing film affixed to at least a portion of the bridge, stress is produced in the bridge inducing a frequency change measured by an acoustic wave device.
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Citations
25 Claims
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1. A system for acoustic sensing, comprising:
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a bridge structure coupled to a substrate about at least two sides of said bridge, wherein said bridge includes a piezoelectric section and has at least one acoustic wave device (AWD) proximate a portion of said bridge, said AWD includes an active acoustic region; and wherein a perturbation of said bridge produces stress effects measurable by said AWD. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A method for detecting a target substance, comprising:
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forming a piezoelectric bridge having at least one acoustic wave device disposed proximate a portion of said bridge; exposing said bridge to some environment; causing a stress response of said bridge from said environment; and detecting a response of said acoustic wave device to said bridge stress response. - View Dependent Claims (15, 16)
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17. A sensing device for measuring stress effects, comprising:
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a substrate having electrical connections disposed about said substrate and providing connectivity to an electrical energy source and a measurement device; a bridge structure coupled to said substrate on a portion of at least two sides of said bridge comprising; at least one acoustic wave device formed proximate a portion of said bridge, said acoustic wave device comprising a piezoelectric section with at least two electrodes disposed thereon, wherein a perturbation of said bridge causes a change in electrical properties of said acoustic wave device, said change in electrical properties modifying a signal from said electrical energy source in a manner that is measurable by said measurement device. - View Dependent Claims (18, 19, 20)
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21. A system for acoustic sensing, comprising:
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a bridge structure coupled to a substrate about a portion of at least two sides of said bridge, wherein said bridge includes a piezoelectric section and having at least one acoustic wave device (AWD) proximate a portion of said bridge, wherein said AWD includes an active acoustic region, wherein boundaries of said active acoustic region are decoupled from boundaries of said bridge; an electrical signal coupled to said bridge structure, wherein stresses induced in said bridge produce force-frequency effects measurable by said AWD; and wherein said force-frequency effects induce modulation of said electrical signal.
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22. A sensing device for measuring physical parameters, comprising:
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a substrate having electrical connections disposed about said substrate and providing connectivity to an electrical energy source and a measurement device; a bridge coupled to said substrate on a portion of at least two sides of said bridge, said bridge comprising; at least one acoustic wave device formed proximate a portion of said bridge, said acoustic wave device comprising a piezoelectric section with at least two electrodes disposed thereon, wherein said bridge is responsive to stresses induced by application of a point force to said bridge, wherein said bridge stress response causes a change in electrical properties of said acoustic wave device, said change in electrical properties modifying a signal from said electrical energy source in a manner that is measurable by said measurement device. - View Dependent Claims (23, 24, 25)
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Specification