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HIGH SENSITIVITY ACOUSTIC WAVE MICROSENSORS BASED ON STRESS EFFECTS

  • US 20080163694A1
  • Filed: 10/19/2007
  • Published: 07/10/2008
  • Est. Priority Date: 11/01/2006
  • Status: Active Grant
First Claim
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1. A system for acoustic sensing, comprising:

  • a bridge structure coupled to a substrate about at least two sides of said bridge, wherein said bridge includes a piezoelectric section and has at least one acoustic wave device (AWD) proximate a portion of said bridge, said AWD includes an active acoustic region; and

    wherein a perturbation of said bridge produces stress effects measurable by said AWD.

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