METHODS AND SYSTEMS FOR USING ELECTRICAL INFORMATION FOR A DEVICE BEING FABRICATED ON A WAFER TO PERFORM ONE OR MORE DEFECT-RELATED FUNCTIONS
First Claim
1. A computer-implemented method, comprising using electrical information for a device being fabricated on a wafer to perform one or more defect-related functions, wherein the one or more defect-related functions comprise one or more post-mask, defect-related functions.
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Abstract
Various methods and systems for using electrical information for a device being fabricated on a wafer to perform one or more defect-related functions are provided. One computer-implemented method includes using electrical information for a device being fabricated on a wafer to perform one or more defect-related functions. The one or more defect-related functions include one or more post-mask, defect-related functions.
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Citations
86 Claims
- 1. A computer-implemented method, comprising using electrical information for a device being fabricated on a wafer to perform one or more defect-related functions, wherein the one or more defect-related functions comprise one or more post-mask, defect-related functions.
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85. A carrier medium, comprising program instructions executable on a computer system for performing a computer-implemented method, wherein the computer-implemented method comprises using electrical information for a device being fabricated on a wafer to perform one or more defect-related functions, and wherein the one or more defect-related functions comprise one or more post-mask, defect-related functions.
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86. A system configured to perform a computer-implemented method, comprising a computer system configured to perform the computer-implemented method, wherein the computer-implemented method comprises using electrical information for a device being fabricated on a wafer to perform one or more defect-related functions, and wherein the one or more defect-related functions comprise one or more post-mask, defect-related functions.
Specification