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Pressure burst free high capacity cryopump

  • US 20080168778A1
  • Filed: 01/15/2008
  • Published: 07/17/2008
  • Est. Priority Date: 01/17/2007
  • Status: Active Grant
First Claim
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1. A method of directing flow from between a vacuum vessel and a radiation shield to control the location of condensate film growth, the method comprising:

  • blocking the flow from an annular spaced defined between the vacuum vessel and the radiation shield; and

    redirecting the flow to a primary pumping surface; and

    condensing the gases at the primary pumping surface to form frost.

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