Storage node of a resistive random access memory device and method of manufacturing the same
First Claim
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1. A storage node comprising:
- a first electrode and a second electrode; and
a resistance change layer formed of Cu2-XO between the first electrode and the second electrode.
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Abstract
Provided are a resistive random access memory device and a method of manufacturing the same. The resistive random access memory device includes a switching device and a storage node connected to the switching device, and the storage node includes a first electrode and a second electrode and a resistance change layer formed of Cu2-XO between the first electrode and the second electrode.
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22 Claims
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1. A storage node comprising:
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a first electrode and a second electrode; and a resistance change layer formed of Cu2-XO between the first electrode and the second electrode. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A method of manufacturing a storage node, the method comprising:
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forming a first electrode; forming a Cu2-XO layer on the first electrode; and forming a second electrode on the Cu2-XO layer. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
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Specification