Micro-Fluidic Systems Based On Actuator Elements

• US 20080170936A1
• Filed: 02/08/2006
• Published: 07/17/2008
• Est. Priority Date: 02/21/2005
• Status: Active Grant

• Current Assignee: Koninklijke Philips N.V.
• Original Assignee: Koninklijke Philips Electronics N.V. (Koninklijke Philips N.V.)
• Inventors: Prins, Menno Willem Jose, Broer, Dirk Jan, Stapert, Hendrik Roelof, Den Toonder, Jacob Marinus Jan
• Granted Patent: US 8,475,145 B2
• Time in Patent Office: Days
• US Class Current: 415/140
• CPC Class Codes: B01F 33/30 Micromixers
• CPC Class Codes: B01F 33/3038 using ciliary stirrers to move or stir the fluids
• CPC Class Codes: B01F 33/453 using supported or suspended stirring elements
• CPC Class Codes: B01L 2400/0484 Cantilevers
• CPC Class Codes: B01L 3/502707 characterised by the manufacture of the container or its components by shaping or joining plastic parts B29C59/00, B29C65/00; by laminating B32B37/00; manufacture of microstructural devices in general B81C
• CPC Class Codes: B01L 3/502746 characterised by the means for controlling flow resistance, e.g. flow controllers, baffles B01L3/502738 takes precedence
• CPC Class Codes: F04B 19/006 Micropumps F04B43/043 and F04B43/095 take precedence
• CPC Class Codes: F04D 33/00 Non-positive-displacement pumps with other than pure rotation, e.g. of oscillating type F04D35/00 takes precedence; hand-held fans A45B
• CPC Class Codes: Y10T 137/0391 Affecting flow by the addition of material or energy
• CPC Class Codes: Y10T 29/49236 Fluid pump or compressor making

Abstract

The present invention provides micro-fluidic systems, a method for the manufacturing of such a micro-fluidic system and a method for controlling or manipulating a fluid flow through micro-channels of a such a micro-fluidic system. Herefore, an inner side of a wall of a microchannel is provided with actuator elements which can change shape and orientation as a response to an external stimulus. Through this change of shape and orientation the flow of a fluid through a microchannel may be controlled and manipulated.

Claims

1. A micro-fluidic system comprising at least one micro-channel (33) having a wall (36) with an inner side (35), wherein the micro-fluidic system furthermore comprises:

a plurality of ciliary actuator elements (30) attached to said inner side (35) of said wall (36), each ciliary actuator element (30) having a shape and an orientation, and

means for applying stimuli to said plurality of ciliary actuator elements (30) so as to cause a change in their shape and/or orientation.

2. A micro-fluidic system according to claim 1, wherein the plurality of ciliary actuator elements are polymer actuator elements.

3. A micro-fluidic system according to claim 2, wherein the polymer actuator elements (30) comprise polymer MEMS.

4. A micro-fluidic system according to claim 1, wherein said means for applying a stimulus to said plurality of ciliary actuator elements (30) is one of an electric field generating means, an electromagnetic field generating means, an electromagnetic radiation means, a magnetic field generating means or a heating means.

5. A micro-fluidic system according to claim 4, wherein said means for applying a stimulus to said ciliary actuator elements (30) is a magnetic field generating means.

6. A micro-fluidic system according to claim 5, wherein said ciliary actuator elements (30) furthermore comprise one of a uniform continuous magnetic layer (37), a patterned continuous magnetic layer and magnetic particles (38).

7. A micro-fluidic system according to claim 1, wherein said plurality of ciliary actuator elements (30) are arranged in a first and a second row, said first row of actuator elements (30) being positioned at a first position of said inner side (35) of said wall (36) and said second row of ciliary actuator elements (30) being positioned at a second position of said inner side (35) of said wall (36), said first position and said second position being substantially opposite to each other.

8. A micro-fluidic system according to claim 1, wherein said plurality of ciliary actuator elements (30) are arranged in a plurality of rows of ciliary actuator elements (30) which are arranged to form a two-dimensional array.

9. A micro-fluidic system according to claim 1, wherein said plurality of ciliary actuator elements (30) are randomly arranged at the inner side (35) of the wall (36).

17. Use of the micro-fluidic system of claim 1 in biotechnological, pharmaceutical, electrical or electronic applications.

10. A method for the manufacturing of a micro-fluidic system comprising at least one micro-channel (33), the method comprising:

providing an inner side (35) of a wall (36) of said at least one micro-channel (33) with a plurality of ciliary actuator elements (30), and

providing means for applying a stimulus to said plurality of ciliary actuator elements (30).

11. A method according to claim 10, wherein providing said plurality of ciliary actuator elements (30) is performed by:

depositing a sacrificial layer having a length L on the inner side (36) of said wall (36),

depositing a actuator material on top of said sacrificial layer,

releasing said actuator material from said inner side (35) of said wall (36) by completely removing said sacrificial layer.

12. A method according to claim 11, wherein removing said sacrificial layer is done by performing an etching step.

13. A method according to claim 10, furthermore comprising providing said ciliary actuator elements (30) with one of a uniform continuous magnetic layer (37), a patterned continuous magnetic layer, or with magnetic particles (38).

14. A method according to claim 13, wherein providing means for applying a stimulus to said ciliary actuator elements (30) comprises providing a magnetic field generating means.

15. A method for controlling a fluid flow through a micro-channel (33) of a micro-fluidic system, the micro-channel (33) having a wall (36) with an inner side (35), the method comprising:

providing said inner side of said wall (36) with a plurality of ciliary actuator elements (30), the ciliary actuator elements (30) each having a shape and an orientation,

applying a stimulus to said ciliary actuator elements (30) so as to cause a change in its shape and/or orientation.

16. A method according to claim 15, wherein applying a stimulus to said ciliary actuator elements (30) is performed by applying a magnetic field.

18. A micro-fluidic system comprising at least one micro-channel (33) having a wall (36) with an inner side (35) and containing a liquid, wherein the micro-fluidic system furthermore comprises:

a plurality of electroactive polymer actuator elements (30) attached to said inner side (35) of said wall (36), and means for applying stimuli to said plurality of electroactive polymer actuator elements (30) to thereby drive the liquid in a direction along the micro-channel (33).

19. A micro-fluidic system according to claim 18, wherein said plurality of electroactive polymer actuator elements (30) comprises a polymer gel or a Ionomeric Polymer-Metal Composite (IPMC).