PLASMA PROCESSING APPARATUS
First Claim
1. A plasma processing apparatus comprising:
- a processing chamber to be depressurized and exhausted;
a sample stage provided in the processing chamber and having a sample placement surface on which a substrate to be processed is placed;
a plasma generating device for generating plasma in the processing chamber;
a heat transfer gas supply system for supplying heat transfer gas to the sample placement surface; and
a coolant channel portion provided inside the sample stage and through which a coolant circulates;
wherein the apparatus further comprising;
a heater layer provided between the sample placement surface and the coolant channel portion inside the sample stage, wherein the heater layer being formed so as to be divided into a plurality of regions in a radius direction of the sample placement surface;
a plurality of temperature monitors provided near the heater layer in the sample stage and in a position corresponding to each of the division regions of the heater layer; and
a temperature controller for estimating a temperature of a position corresponding to each of the division regions of the substrate placed on the sample placement surface base on temperature data from the plurality of temperature monitors and controls power supply to each of the division regions of the heater layer according to the estimated temperature value.
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Accused Products
Abstract
It is possible to provide a plasma etching apparatus that controls the temperature of a sample at a higher speed and with more accuracy to improve the efficiency of processing the sample. A plasma processing apparatus includes a processing chamber to be depressurized and exhausted, a sample placement electrode provided in the processing chamber and having a sample placement surface on which a substrate to be processed is placed, an electromagnetic generation device to generate plasma in the processing chamber, a supply system that supplies processing gas to the processing chamber, a vacuum exhaust system that exhausts inside the processing chamber, a heater layer and a base temperature monitor that are disposed on the sample placement electrode, a wafer temperature estimating unit that estimates a wafer temperature from the base temperature monitor and plasma forming power supply, and a controller that regulates the heater corresponding to output from the temperature estimating unit.
40 Citations
10 Claims
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1. A plasma processing apparatus comprising:
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a processing chamber to be depressurized and exhausted; a sample stage provided in the processing chamber and having a sample placement surface on which a substrate to be processed is placed; a plasma generating device for generating plasma in the processing chamber; a heat transfer gas supply system for supplying heat transfer gas to the sample placement surface; and a coolant channel portion provided inside the sample stage and through which a coolant circulates;
wherein the apparatus further comprising;a heater layer provided between the sample placement surface and the coolant channel portion inside the sample stage, wherein the heater layer being formed so as to be divided into a plurality of regions in a radius direction of the sample placement surface; a plurality of temperature monitors provided near the heater layer in the sample stage and in a position corresponding to each of the division regions of the heater layer; and a temperature controller for estimating a temperature of a position corresponding to each of the division regions of the substrate placed on the sample placement surface base on temperature data from the plurality of temperature monitors and controls power supply to each of the division regions of the heater layer according to the estimated temperature value. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A plasma processing apparatus comprising:
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a processing chamber to be depressurized and exhausted; a processing gas supply system for supplying processing gas to the processing chamber; a sample stage provided in the processing chamber and having a sample placement surface on which a substrate to be processed is placed, the sample stage including; a base member; a heater layer provided above the base member, being formed so as to be divided into a plurality of regions in a radius direction of the sample placement surface; and a dielectric material film covering the heater layer and including the sample placement surface, a bias power supply for applying bias power to the sample stage; an electromagnetic generation device for generating plasma in the processing chamber; a heat transfer gas supply system for supplying heat transfer gas to the sample placement surface; and a coolant channel portion provided inside the sample stage and through which a coolant circulates;
wherein the apparatus further comprising;a plurality of base temperature monitors provided near a surface of the base member for measuring a temperature of a position corresponding to each of the division regions of the heater layer; and a temperature controller for estimating a temperature of a position corresponding to each of the division regions of the substrate placed on the sample placement surface base on temperature data from the base temperature monitors using electromagnetic field input power to the plasma and the bias power as inputs and controls power supply to each of the division regions of the heater layer according to the estimated temperature value of the substrate. - View Dependent Claims (9, 10)
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Specification