Polishing compound and method for producing semiconductor integrated circuit device
First Claim
1. A polishing compound for chemical mechanical polishing to polish a surface to be polished in production of a semiconductor integrated circuit device, which comprises abrasive particles (A) having an average primary particle size in a range of from 5 to 300 nm and an association ratio in the polishing compound in a range from 1.5 to 5, an oxidizing agent (B), a protective film-forming agent (C), an acid (D), a basic compound (E) and water (F).
1 Assignment
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Accused Products
Abstract
In polishing of a surface to be polished in production of a semiconductor integrated circuit device, it is possible to obtain a flat surface of an insulating layer having an embedded metal wiring. Further, it is possible to obtain a semiconductor integrated circuit device having a highly planarized multilayer structure.
A polishing compound for chemical mechanical polishing to polish a surface to be polished for a semiconductor integrated circuit device, which comprises abrasive particles (A) having an average primary particle size in a range of from 5 to 300 nm and an association ratio in the polishing compound in a range from 1.5 to 5, an oxidizing agent (B), a protective film-forming agent (C), an acid (D), a basic compound (E) and water (F).
18 Citations
11 Claims
- 1. A polishing compound for chemical mechanical polishing to polish a surface to be polished in production of a semiconductor integrated circuit device, which comprises abrasive particles (A) having an average primary particle size in a range of from 5 to 300 nm and an association ratio in the polishing compound in a range from 1.5 to 5, an oxidizing agent (B), a protective film-forming agent (C), an acid (D), a basic compound (E) and water (F).
Specification