DERIVED METRIC FOR MONITORING DIE PLACEMENT

• US 20080172142A1
• Filed: 01/12/2007
• Published: 07/17/2008
• Est. Priority Date: 01/12/2007
• Status: Active Grant

• Current Assignee: GlobalFoundries, Inc.
• Original Assignee: Advanced Micro Devices, Inc.
• Inventors: Tristan, John E.
• Granted Patent: US 7,390,681 B1
• Time in Patent Office: Days
• US Class Current: 700/114
• CPC Class Codes: G05B 19/401 characterised by control arrangements for measuring, e.g. calibration and initialisation, measuring workpiece for machining purposes G05B19/19 takes precedence
• CPC Class Codes: G05B 2219/49113 Align elements like hole and drill, centering tool, probe, workpiece

Abstract

A method for monitoring die placement includes receiving measurements of an alignment of a semiconductor die mounted in a package by a die packaging tool. The measurements include center offset metrics associated with displacement of a center of the die. A plurality of corner offset metrics is determined based on the center offset metrics and dimensions of the die. A maximum one of the corner offset metrics is selected as a die placement metric. An out of tolerance condition with the die packaging tool is identified based on the die placement metric.

Claims

1. A method for monitoring die placement, comprising:

receiving measurements of an alignment of a semiconductor die mounted in a package by a die packaging tool, the measurements including center offset metrics associated with displacement of a center of the die with respect to an ideal placement of the die;

determining a plurality of corner offset metrics based on the center offset metrics and dimensions of the die;

selecting a maximum one of the corner offset metrics as a die placement metric; and

identifying an out of tolerance condition with the die packaging tool based on the die placement metric.

2. The method of claim 1, wherein the center offset metrics comprise rectangular offsets and an angular offset.

3. The method of claim 1, wherein determining each of the corner offset metrics comprises:

determining baseline coordinates of each corner for the ideal placement of the die;

determining a plurality of corner vectors defining the position of actual corners of the die with respect to the baseline coordinates for the associated corner; and

determining a magnitude of each corner vector.

4. The method of claim 3, wherein determining the plurality of corner vectors comprises employing the equation

5. The method of claim 1, further comprising automatically adjusting at least one parameter of the die packaging tool responsive to identifying the out of tolerance condition.

6. The method of claim 5, further comprising adjusting the at least one parameter of the die packaging tool based on the center offset metrics associated with the die placement metric.

7. The method of claim 1, further comprising sending an alert message to an operator of the die packaging tool responsive to identifying the out of tolerance condition.

8. The method of claim 1, further comprising sending an alert message to a maintenance scheduling server responsive to identifying the out of tolerance condition.

9. The method of claim 1, further comprising:

determining die placement metrics for a plurality of semiconductor die;

generating a control chart including the die placement metrics; and

identifying the out of tolerance condition based on the control chart.

10. A system, comprising:

a die placement metrology tool operable to measure an alignment of a semiconductor die at least partially mounted in a package by a die packaging tool to generate center offset metrics associated with displacement of a center of the die with respect to an ideal placement of the die; and

a placement monitor operable to determine a plurality of corner offset metrics based on the center offset metrics and dimensions of the die, select a maximum one of the corner offset metrics as a die placement metric, and identify an out of tolerance condition with the die packaging tool based on the die placement metric.

11. The system of claim 10, wherein the center offset metrics comprise rectangular offsets and an angular offset.

12. The system of claim 10, wherein the placement monitor is further operable to determine baseline coordinates of each corner for the ideal placement of the die, determine a plurality of corner vectors defining the position of actual corners of the die with respect to the baseline coordinates for the associated corner, and determine a magnitude of each corner vector.

13. The system of claim 12, wherein the placement monitor is operable to generate the corner vectors comprises by employing the equation

14. The system of claim 10, further comprising a tool controller operable to receive notification of the out of tolerance condition from the placement monitor and adjust at least one parameter of the die packaging tool.

15. The system of claim 14, wherein the tool controller is operable to adjust the at least one parameter of the die packaging tool based on the center offset metrics associated with the die placement metric.

16. The system of claim 10, wherein the placement monitor is further operable to send an alert message to an operator of the die packaging tool responsive to identifying the out of tolerance condition.

17. The system of claim 10, wherein the placement monitor is further operable to send an alert message to a maintenance scheduling server responsive to identifying the out of tolerance condition.

18. The system of claim 10, wherein the placement monitor is further operable to determine die placement metrics for a plurality of semiconductor die, generate a control chart including the die placement metrics, and identify the out of tolerance condition based on the control chaff.

19. A system, comprising:

means for receiving measurements of an alignment of a semiconductor die at least partially mounted in a package by a die packaging tool, the measurements including center offset metrics associated with displacement of a center of the die with respect to an ideal placement of the die;

means for determining a plurality of corner offset metrics based on the center offset metrics and dimensions of the die;

means for selecting a maximum one of the corner offset metrics as a die placement metric; and

means for identifying an out of tolerance condition with the die packaging tool based on the die placement metric.

20. The system of claim 19, further comprising:

means for determining baseline coordinates of each corner for the ideal placement of the die;

means for determining a plurality of corner vectors defining the position of actual corners of the die with respect to the baseline coordinates for the associated corner; and

means for determining a magnitude of each corner vector.

21. The system of claim 20, wherein the means for determining the plurality of corner vectors comprises means for employing the equation