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Plasma Immersion Chamber

  • US 20080173237A1
  • Filed: 01/18/2008
  • Published: 07/24/2008
  • Est. Priority Date: 01/19/2007
  • Status: Abandoned Application
First Claim
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1. A toroidal plasma source, comprising:

  • a first hollow conduit comprising a U shape and a rectangular cross-section;

    a second hollow conduit comprising an M shape and a rectangular cross-section;

    an opening disposed at opposing ends of each of the first and second hollow conduits; and

    a coating disposed on an interior surface of each of the first and second hollow conduits.

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