Plasma Immersion Chamber
First Claim
Patent Images
1. A toroidal plasma source, comprising:
- a first hollow conduit comprising a U shape and a rectangular cross-section;
a second hollow conduit comprising an M shape and a rectangular cross-section;
an opening disposed at opposing ends of each of the first and second hollow conduits; and
a coating disposed on an interior surface of each of the first and second hollow conduits.
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Accused Products
Abstract
Embodiments described herein generally provide a toroidal plasma source, a plasma channeling device, a showerhead, and a substrate support assembly for use in a plasma chamber. The toroidal plasma source, plasma channeling device, showerhead, and substrate support assembly are adapted to improve the usable lifetime of the plasma chamber, as well as reduce assembly cost, increase the plasma chamber reliability, and improve device yield on the processed substrates.
462 Citations
23 Claims
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1. A toroidal plasma source, comprising:
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a first hollow conduit comprising a U shape and a rectangular cross-section; a second hollow conduit comprising an M shape and a rectangular cross-section; an opening disposed at opposing ends of each of the first and second hollow conduits; and a coating disposed on an interior surface of each of the first and second hollow conduits. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A plasma channeling apparatus, comprising:
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a body having at least two channels disposed longitudinally therethrough, the at least two channels being separated by a wedge-shaped member; and a coolant channel formed at least partially in a sidewall of the body. - View Dependent Claims (9, 10, 11)
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12. A gas distribution plate, comprising:
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a circular member having a first side and a second side; a recessed portion formed in a central region of the first side to form an edge along a portion of the first side of the circular member, wherein the recessed portion includes a plurality of orifices that extend from the first side to the second side; and
a mounting portion coupled to a perimeter of the circular member and extending radially therefrom. - View Dependent Claims (13, 14, 15, 16)
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17. A cathode assembly for a substrate support, comprising:
a body having; a conductive upper layer; a conductive lower layer; and a dielectric material electrically separating the upper layer and the lower layer, wherein at least one opening is formed longitudinally through the body; and one or more dielectric fillers disposed at locations within the body selected from the group consisting of;
a first interface between the dielectric material and the upper layer; and
a second interface between the dielectric material and the lower layer, and combinations thereof.- View Dependent Claims (18, 19, 20, 21, 22, 23)
Specification