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Capacitive sensor

  • US 20080173303A1
  • Filed: 01/19/2007
  • Published: 07/24/2008
  • Est. Priority Date: 01/19/2007
  • Status: Active Grant
First Claim
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1. A capacitive sensor element for differential pressure sensors, comprising:

  • a first fixed charge plate with a port coupled to a first pressure source;

    a flexible charge plate;

    means for securely separating the first fixed charge plate and the flexible charge plate wherein the charge plates are an initial distance apart;

    means for electrically grounding the flexible charge plate;

    a lid with a port coupled to a second pressure source;

    means for securely separating the flexible charge plate and the lid;

    means for providing a voltage to the first fixed charge plate;

    means for measuring an accumulated voltage across the first fixed charge plate and the flexible charge plate for a given amount of time wherein the accumulated voltage is a function of a variable distance between the first charge plate and the flexible charge plate; and

    means for calculating the differential pressure based on the change in the initial distance and the variable distance.

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