ELECTRICALLY ACTUATED VALVES MADE FROM SHAPE MEMORY ALLOY WIRES EMBEDDED IN ELASTOMER
First Claim
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1. A microfluidic valve for controlling a flow of a fluid, comprising:
- a substrate having at least two tie down points;
adjacent said substrate, a microfluidic valve body constructed from an elastomeric material, said valve body having a flow channel configured to have therein a valve seat and a valve piston, said valve seat and said valve piston having a first relative position wherein said flow channel is in a first state and a second relative position wherein said flow channel is in a second state different from said first state; and
an actuator constructed from a shape memory alloy material, said actuator being attached at two of said at least two tie down points, said actuator configured to move said valve piston relative to said valve seat in response to an actuation signal so as to change the state of said flow channel from one of said first and second states to the other of said first and second states.
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Abstract
Microfluidic valves constructed from elastomeric materials as the valve body components and employing shape memory alloy in wire form as the valve actuator. Various configurations of individual valves having both normally open and normally closed states are described. Apparatus using such valves and providing logic functionality with fluidic logic outputs are discussed. Apparatus that can be used for materials processing at the nano- or micro-scale are presented. Various forms of logical control of valve arrays are explained.
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Citations
17 Claims
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1. A microfluidic valve for controlling a flow of a fluid, comprising:
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a substrate having at least two tie down points; adjacent said substrate, a microfluidic valve body constructed from an elastomeric material, said valve body having a flow channel configured to have therein a valve seat and a valve piston, said valve seat and said valve piston having a first relative position wherein said flow channel is in a first state and a second relative position wherein said flow channel is in a second state different from said first state; and an actuator constructed from a shape memory alloy material, said actuator being attached at two of said at least two tie down points, said actuator configured to move said valve piston relative to said valve seat in response to an actuation signal so as to change the state of said flow channel from one of said first and second states to the other of said first and second states. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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Specification