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Z-AXIS MICROELECTROMECHANICAL DEVICE WITH IMPROVED STOPPER STRUCTURE

  • US 20080173959A1
  • Filed: 01/15/2008
  • Published: 07/24/2008
  • Est. Priority Date: 01/19/2007
  • Status: Active Grant
First Claim
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1. A microelectromechanical device comprising:

  • a mobile mass, suspended above a substrate via elastic suspension elements and rotatable about said elastic suspension elements;

    a cover structure arranged above said mobile mass and having an internal surface facing said mobile mass; and

    a stopper structure arranged at said internal surface of said cover structure and extending towards said mobile mass and designed to stop a movement of said mobile mass away from said substrate along an axis (z) transverse to said substrate, said stopper structure arranged with respect to said mobile mass to reduce an effect of a reciprocal interaction.

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