Z-AXIS MICROELECTROMECHANICAL DEVICE WITH IMPROVED STOPPER STRUCTURE
First Claim
1. A microelectromechanical device comprising:
- a mobile mass, suspended above a substrate via elastic suspension elements and rotatable about said elastic suspension elements;
a cover structure arranged above said mobile mass and having an internal surface facing said mobile mass; and
a stopper structure arranged at said internal surface of said cover structure and extending towards said mobile mass and designed to stop a movement of said mobile mass away from said substrate along an axis (z) transverse to said substrate, said stopper structure arranged with respect to said mobile mass to reduce an effect of a reciprocal interaction.
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Accused Products
Abstract
In a microelectromechanical device, a mobile mass is suspended above a substrate via elastic suspension elements and is rotatable about said elastic suspension elements, a cover structure is set above the mobile mass and has an internal surface facing the mobile mass, and a stopper structure is arranged at the internal surface of the cover structure and extends towards the mobile mass in order to stop a movement of the mobile mass away from the substrate along an axis (z) transverse to the substrate. The stopper structure is arranged with respect to the mobile mass so as to reduce an effect of reciprocal electrostatic interaction, in particular so as to minimize a resultant twisting moment of the mobile mass about the elastic suspension elements.
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Citations
26 Claims
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1. A microelectromechanical device comprising:
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a mobile mass, suspended above a substrate via elastic suspension elements and rotatable about said elastic suspension elements; a cover structure arranged above said mobile mass and having an internal surface facing said mobile mass; and a stopper structure arranged at said internal surface of said cover structure and extending towards said mobile mass and designed to stop a movement of said mobile mass away from said substrate along an axis (z) transverse to said substrate, said stopper structure arranged with respect to said mobile mass to reduce an effect of a reciprocal interaction. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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19. A process for manufacturing a microelectromechanical device, comprising:
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forming a mobile mass, suspended above a substrate via elastic suspension elements and rotatable about said elastic suspension elements; coupling, above said mobile mass, a cover structure having an internal surface facing said mobile mass; and forming a stopper structure at said internal surface of said cover structure and extending towards said mobile mass and configured to stop a movement of said mobile mass away from said substrate along an axis (z) transverse to said substrate, forming a stopper structure comprises arranging said stopper structure with respect to said mobile mass so as to reduce an effect of a reciprocal interaction. - View Dependent Claims (20, 21)
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22. A device, comprising:
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a mobile mass suspended above a substrate on an elastic suspension system to rotate about the elastic suspension system, the mobile mass having a larger portion on one side of the elastic suspension system and a smaller portion on an opposite side of the elastic suspension system to have a twisting moment about a rotational axis of the elastic suspension system; and a cover structure arranged above the mobile mass and having an internal surface facing the mobile mass, the cover structure comprising a stopper structure extending toward the mobile mass and separated therefrom by a distance that stops a movement of the mobile mass away from the substrate along an axis substantially perpendicular to the substrate, the stopper structure configured to have a greater area of overlap with the smaller portion of the mobile mass than with the larger portion of the mobile mass, resulting in an electrostatic force between the stopper structure and the mobile mass to counteract the twisting moment of the mobile mass. - View Dependent Claims (23, 24, 25, 26)
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Specification