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MicroElectroMechanical Systems Contact Stress Sensor

  • US 20080173960A1
  • Filed: 10/10/2007
  • Published: 07/24/2008
  • Est. Priority Date: 11/17/2004
  • Status: Abandoned Application
First Claim
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1. A microelectromechanical systems stress sensor, comprising:

  • a microelectromechanical systems body,a recess in said body,a silicon element that extends into said recess, said silicon element having limited freedom of movement within said recess, andan electrical circuit in said silicon element, said electrical circuit including a piezoresistor material.

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