TEST SOCKETS HAVING PELTIER ELEMENTS, TEST EQUIPMENT INCLUDING THE SAME AND METHODS OF TESTING SEMICONDUCTOR PACKAGES USING THE SAME
First Claim
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1. A test socket comprising:
- a socket body in which a semiconductor package is located;
a socket head combined with the socket body;
a Peltier element arranged in the socket head adjacent the semiconductor package; and
power terminals connected to the Peltier element.
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Abstract
A test socket includes a socket body in which a semiconductor package is located, a socket head combined with the socket body, a Peltier element in the socket head, and power terminals connected to the Peltier element. A test equipment includes the test socket and a method of testing the semiconductor package uses the test socket.
10 Citations
16 Claims
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1. A test socket comprising:
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a socket body in which a semiconductor package is located; a socket head combined with the socket body; a Peltier element arranged in the socket head adjacent the semiconductor package; and power terminals connected to the Peltier element. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A method of testing a semiconductor package, the method comprising:
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i) providing a test socket having a socket body, a socket head disposed on the socket body for combination with the socket body, a Peltier element in the socket head, and power terminals connected to the Peltier element; ii) inserting a semiconductor package into the socket body; iii) applying a first voltage to the power terminals to generate heat from the Peltier element, the heat from the Peltier element being conducted to the semiconductor package; iv) operating the semiconductor package; v) testing the semiconductor package; and vi) replacing the semiconductor package that has been tested with a new semiconductor package to be tested. - View Dependent Claims (8, 9, 10)
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11. A test equipment comprising:
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a test unit having a test socket in which a semiconductor package is located; a temperature sensing unit connected to the test unit to indicate a temperature of the semiconductor package; and a control unit connected to the temperature sensing unit to control the test unit, wherein the test socket comprises; a socket body in which the semiconductor package is located; a socket head combined with the socket body; a Peltier element arranged in the socket head to be adjacent the semiconductor package; and power terminals connected to the Peltier element. - View Dependent Claims (12, 13, 14, 15, 16)
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Specification