Deformable mirror device with oscillating states

• US 20080174855A1
• Filed: 12/24/2007
• Published: 07/24/2008
• Est. Priority Date: 12/26/2006
• Status: Active Grant

• Current Assignee: Ignite USA (Ignite), Olympus Corporation
• Original Assignee: Olympus Corporation, Silicon Quest Kabushiki-Kaisha
• Inventors: Maeda, Yoshihiro, Ichikawa, Hirotoshi, Arai, Kazuma, Ishii, Fusao
• Granted Patent: US 7,646,528 B2
• Time in Patent Office: Days
• US Class Current: 359/318
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means

Abstract

A mirror device which deflects incident light includes: a mirror arranged on a substrate and supported by a hinge; an address electrode deflecting the mirror to an ON state, an OFF state, or an oscillating state; a drive circuit applying a voltage to the address electrode; and a first stopper unit determining an oscillation amplitude in the oscillating state.

Claims

1. A mirror device which deflects incident light, comprising:

a mirror arranged on a substrate and supported by a hinge;

an address electrode deflecting the mirror to an ON state, an OFF state, or an oscillating state;

a drive circuit applying a voltage to the address electrode; and

a first stopper unit determining an oscillation amplitude in the oscillating state.

2. The device according to claim 1, wherein:

the address electrode is projected from the substrate; and

the first stopper unit is provided for the address electrode.

3. The device according to claim 1, wherein:

the first stopper unit further determines the ON state or the OFF state.

4. The device according to claim 1, wherein:

the oscillating state is started from a state in which the mirror becomes contacted to the first stopper unit.

5. The device according to claim 1, wherein:

the oscillating state continues in a plurality of periods.

6. The device according to claim 1, wherein:

the mirror is determined in the ON state or the OFF state after the oscillation amplitude in the oscillating state is attenuated by a predetermined amount.

7. The device according to claim 1, wherein:

the oscillating state indicates oscillation of the mirror between the ON state and the OFF state.

8. The device according to claim 1, further comprising:

a second stopper unit determining the intermediate state when the mirror is deflected to the intermediate state.

9. The device according to claim 1, wherein:

the mirror can be deflected further to an intermediate state; and

the oscillating state indicates oscillation of the mirror between the intermediate state and the OFF state or the intermediate state and the ON state.

13. The device according to claim 1, wherein:

a maximum deflection angle of the mirror in the oscillating state or the intermediate state is larger than a deflection angle of the mirror in the ON state or the OFF state.

10. A mirror device that deflects incident light, comprising:

a mirror arranged on a substrate and supported by a hinge substantially perpendicular to the substrate;

a plurality of address electrodes for deflecting the mirror to an ON state, an OFF state, or an oscillating state or an intermediate state;

a drive circuit for applying a voltage to the address electrode; and

a stopper unit for determining the oscillating state or the intermediate state.

11. The device according to claim 10, wherein:

the deformable axis of the mirror in the oscillating state or the intermediate state is different from a deformable axis when deflection is performed to the ON state or the OFF state.

12. The device according to claim 10, wherein:

a maximum deflection angle of the mirror in the oscillating state or the intermediate state is equal to a deflection angle of the mirror in the ON state or the OFF state, or smaller than a deflection angle of the mirror in the ON state or the OFF state.

14. The device according to claim 10, wherein:

the stopper unit is a structure including an elastic member or a movable portion.

15. The device according to claim 10, wherein:

a voltage applied to the address electrode that deflects the mirror to the intermediate state is different from a voltage applied to the address electrode that deflects the mirror to the ON state or the OFF state.

16. The device according to claim 10 wherein:

a deflection angle of the mirror in the intermediate state is substantially parallel to the substrate.

17. The device according to claim 10, wherein:

a deflection angle of the mirror in the ON state or the OFF state is substantially parallel to the substrate.

18. The device according to claim 10, wherein:

spring elastic force of the hinge depends on a deflection direction.

19. The device according to claim 10, wherein:

the address electrode is projected from the substrate; and

the stopper unit is provided for the address electrode.