ELECTROSTATIC CHUCK WITH HEATER AND MANUFACTURING METHOD THEREOF
First Claim
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1. An electrostatic chuck, comprising:
- a plate-like base that is made of ceramics and has a substrate mounting surface on which a substrate is to be mounted; and
a dielectric electrode embedded in the base,wherein the base includes a support portion made of alumina ceramics, and a surface portion that is made of yttria ceramics and forms at least the substrate mounting surface of the base on a surface of the base, anda carbon content in alumina ceramics in a vicinity of the dielectric electrode is 0.05 wt %.
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Abstract
An electrostatic chuck includes a base. The base has a support portion made of alumina ceramics, and a surface portion made of yttria ceramics. The surface portion forms at least a substrate mounting surface and side surface of the base on a surface of the support portion. Carbon contents in alumina ceramics of the support portion and yttria ceramics of the surface portion are 0.05 wt % or less.
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Citations
10 Claims
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1. An electrostatic chuck, comprising:
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a plate-like base that is made of ceramics and has a substrate mounting surface on which a substrate is to be mounted; and a dielectric electrode embedded in the base, wherein the base includes a support portion made of alumina ceramics, and a surface portion that is made of yttria ceramics and forms at least the substrate mounting surface of the base on a surface of the base, and a carbon content in alumina ceramics in a vicinity of the dielectric electrode is 0.05 wt %. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A manufacturing method of an electrostatic chuck, comprising the steps of:
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forming a plate-like alumina sintered body with a carbon content of 0.05 wt % or less from a raw material of alumina ceramics; forming a dielectric electrode on one surface of the alumina sintered body; forming an yttria member so as to cover the dielectric electrode and the surface of the alumina sintered body, on which the dielectric electrode is formed; and sintering the alumina sintered body and the yttria member while integrally pressing the alumina sintered body and the yttria member in a uniaxial direction, thereby forming a base. - View Dependent Claims (8, 9, 10)
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Specification