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Method, system and medium for controlling manufacturing process using adaptive models based on empirical data

  • US 20080177408A1
  • Filed: 12/20/2007
  • Published: 07/24/2008
  • Est. Priority Date: 07/19/2002
  • Status: Active Grant
First Claim
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1. A computer method for generating parameters for a manufacturing apparatus to produce wafers, the method comprising:

  • identifying one or more input parameters that cause a change in output characteristics of the wafers produced by the manufacturing apparatus;

    estimating the output characteristics of the wafers based on changes to the input parameters;

    minimizing a first mathematical function to yield optimized output values; and

    generating a recipe for controlling the manufacturing apparatus for producing the wafers based on the optimized output values.

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