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Acceleration Insensitive Pressure Sensor

  • US 20080178666A1
  • Filed: 06/25/2007
  • Published: 07/31/2008
  • Est. Priority Date: 10/18/2004
  • Status: Active Grant
First Claim
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1. A pressure sensor for sensing a fluid pressure, the pressure sensor comprising:

  • a non-planar membrane between fluid at a reference pressure and fluid at the pressure to be sensed, such that the non-planar membrane deflects due to pressure differentials between the reference pressure and the fluid pressure; and

    ,associated circuitry for converting the deflection of the non-planar membrane into an output signal indicative of the fluid pressure;

    wherein,the membrane area exposed to the fluid at the reference pressure has a mass of less than 0.1 grams.

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