Acceleration Insensitive Pressure Sensor
First Claim
1. A pressure sensor for sensing a fluid pressure, the pressure sensor comprising:
- a non-planar membrane between fluid at a reference pressure and fluid at the pressure to be sensed, such that the non-planar membrane deflects due to pressure differentials between the reference pressure and the fluid pressure; and
,associated circuitry for converting the deflection of the non-planar membrane into an output signal indicative of the fluid pressure;
wherein,the membrane area exposed to the fluid at the reference pressure has a mass of less than 0.1 grams.
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Accused Products
Abstract
A pressure sensor for sensing a fluid pressure in a high acceleration environment. The sensor has a non-planar membrane between fluid at a reference pressure and fluid at the pressure to be sensed, such that the non-planar membrane deflects due to pressure differentials between the reference pressure and the fluid pressure. The deflection is converted into an output signal indicative of the fluid pressure by associated circuitry. By keeping the area of the membrane exposed to the fluid in the chamber to less than 0.1 grams, the acceleration forces have minimal affect on the amount that membrane flexes.
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Citations
20 Claims
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1. A pressure sensor for sensing a fluid pressure, the pressure sensor comprising:
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a non-planar membrane between fluid at a reference pressure and fluid at the pressure to be sensed, such that the non-planar membrane deflects due to pressure differentials between the reference pressure and the fluid pressure; and
,associated circuitry for converting the deflection of the non-planar membrane into an output signal indicative of the fluid pressure;
wherein,the membrane area exposed to the fluid at the reference pressure has a mass of less than 0.1 grams. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification