Surface Acoustic Wave Device and Manufacturing Method Therefor, and Communications Equipment
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Abstract
A surface acoustic wave device configured by forming an oxide layer 2 on a piezoelectric substrate 1 composed of a lithium tantalate single crystal or a lithium niobate single crystal and having weak pyroelectric properties having a lower oxygen content than a stoichiometric composition ratio, and forming thereon an IDT electrode 3. There is no static destruction of a minute electrode due to the pyroelectric effect of the piezoelectric substrate having weak pyroelectric properties, and frequency characteristics are not degraded.
15 Citations
20 Claims
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1-15. -15. (canceled)
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16. A method of manufacturing a surface acoustic wave device, comprising the steps of:
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forming an oxide layer on a surface of a piezoelectric substrate having weak pyroelectric properties composed of a lithium tantalate single crystal or a lithium niobate single crystal; and forming an IDT electrode on a surface of the oxide layer on the piezoelectric substrate having weak pyroelectric properties. - View Dependent Claims (17, 18)
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19. A method of manufacturing a surface acoustic wave device, comprising the steps of:
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forming an IDT electrode on a surface of a piezoelectric substrate having weak pyroelectric properties composed of a lithium tantalate single crystal or a lithium niobate single crystal; and forming an oxide layer on the surface of the piezoelectric substrate having weak pyroelectric properties having the IDT electrode formed thereon using the IDT electrode as a mask.
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20-21. -21. (canceled)
Specification