MEMS DEVICE AND FABRICATION METHOD OF THE SAME
First Claim
Patent Images
1. A microelectromechanical systems (MEMS) device comprising:
- a frame;
an actuator formed on a same layer as the frame and connected to the frame to be capable of performing a relative motion with respect to the frame; and
at least one stopper which restricts a displacement of the actuator in a direction along a height of the actuator.
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Abstract
A microelectromechanical systems (MEMS) device includes a frame, an actuator formed on the same layer as the frame and connected to the frame to be capable of performing a relative motion with respect to the frame, and at least one stopper restricting a displacement of the actuator in a direction along the height of the actuator. The MEMS device is fabricated by bonding a second substrate to a first substrate, forming the frame and the actuator by partially removing the first substrate, and forming the at least one stopper by partially removing the second substrate.
19 Citations
24 Claims
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1. A microelectromechanical systems (MEMS) device comprising:
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a frame; an actuator formed on a same layer as the frame and connected to the frame to be capable of performing a relative motion with respect to the frame; and at least one stopper which restricts a displacement of the actuator in a direction along a height of the actuator. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A method of fabricating a microelectromechanical systems (MEMS) device, the method comprising:
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bonding a second substrate to a first substrate; forming a frame and an actuator connected to the frame to be capable of performing a relative motion with respect to the frame by partially removing the first substrate; and forming at least one stopper which restricts a displacement of the actuator in a direction along the height of the actuator by partially removing the second substrate. - View Dependent Claims (15, 16, 17, 18, 19, 20, 21, 22, 23, 24)
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Specification