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DROPLET DISCHARGING HEAD AND METHOD OF MANUFACTURING THE SAME, AND DROPLET DISCHARGING DEVICE AND METHOD OF MANUFACTURING THE SAME

  • US 20080180489A1
  • Filed: 10/01/2007
  • Published: 07/31/2008
  • Est. Priority Date: 10/02/2006
  • Status: Active Grant
First Claim
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1. A droplet discharging head, comprising:

  • a cavity substrate including a discharge chamber having a bottom wall serving as a vibration plate; and

    an electrode substrate including;

    an individual electrode that faces the vibration plate with a gap and drives the vibration plate; and

    a driver integrated circuit (IC) that couples with the individual electrode and applies a voltage to the individual electrode, wherein the cavity substrate includes;

    a first opening that penetrates the cavity substrate and serves to house the driver IC; and

    an insulation film formed on a wall face of the first opening.

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