Magnetic Tunnel Barriers and Associated Magnetic Tunnel Junctions with High Tunneling Magnetoresistance

• US 20080182342A1
• Filed: 10/31/2007
• Published: 07/31/2008
• Est. Priority Date: 07/02/2004
• Status: Active Grant

• Current Assignee: International Business Machines Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: Parkin, Stuart Stephen Papworth
• Granted Patent: US 7,906,231 B2
• Time in Patent Office: Days
• US Class Current: 438/3
• CPC Class Codes: B82Y 10/00 Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• CPC Class Codes: B82Y 25/00 Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
• CPC Class Codes: G01R 33/093 using multilayer structures, e.g. giant magnetoresistance sensors thin magnetic films H01F10/00
• CPC Class Codes: G01R 33/098 comprising tunnel junctions, e.g. tunnel magnetoresistance sensors
• CPC Class Codes: G11B 5/3906 Details related to the use of magnetic thin film layers or to their effects
• CPC Class Codes: G11B 5/3909 Arrangements using a magnetic tunnel junction
• CPC Class Codes: G11C 11/16 using elements in which the storage effect is based on magnetic spin effect
• CPC Class Codes: H01F 10/3254 the spacer being semiconducting or insulating, e.g. for spin tunnel junction [STJ]
• CPC Class Codes: H01F 10/3272 by use of anti-parallel coupled [APC] ferromagnetic layers, e.g. artificial ferrimagnets [AFI], artificial [AAF] or synthetic [SAF] anti-ferromagnets
• CPC Class Codes: H01F 10/3295 Spin-exchange coupled multilayers wherein the magnetic pinned or free layers are laminated without anti-parallel coupling within the pinned and free layers
• CPC Class Codes: H10N 50/10 Magnetoresistive devices
• CPC Class Codes: Y10T 428/1107 Magnetoresistive
• CPC Class Codes: Y10T 428/1114 having tunnel junction effect
• CPC Class Codes: Y10T 428/1121 Multilayer
• CPC Class Codes: Y10T 428/115 Magnetic layer composition
• CPC Class Codes: Y10T 428/1193 with interlaminar component [e.g., adhesion layer, etc.]

Abstract

Magnetic tunneling devices are formed from a first body centered cubic (bcc) magnetic layer and a second bcc magnetic layer. At least one spacer layer of bcc material between these magnetic layers exchange couples the first and second bcc magnetic layers. A tunnel barrier in proximity with the second magnetic layer permits spin-polarized current to pass between the tunnel barrier and the second layer; the tunnel barrier may be either MgO and Mg—ZnO. The first magnetic layer, the spacer layer, the second magnetic layer, and the tunnel barrier are all preferably (100) oriented. The MgO and Mg—ZnO tunnel barriers are prepared by first depositing a metallic layer on the second magnetic layer (e.g., a Mg layer), thereby substantially reducing the oxygen content in this magnetic layer, which improves the performance of the tunnel barriers.

Claims

1. A method, comprising:

forming a tunnel barrier over a first body centered cubic (bcc) magnetic layer, wherein the tunnel barrier is selected from the group consisting of MgO and Mg—

ZnO tunnel barriers; and

forming a second bcc magnetic layer over the tunnel barrier, in which the first bcc magnetic layer, the tunnel barrier, and the second bcc magnetic layer constitute a magnetic tunnel junction having a tunneling magnetoresistance of greater than 100% at room temperature, wherein;

at least one of the first and second bcc magnetic layers includes two bcc magnetic layers separated by a bcc spacer layer that exchange couples said two bcc magnetic layers.

2. The method of claim 1, said forming the tunnel barrier comprising:

depositing Mg onto a surface to form a Mg layer thereon, wherein the surface is selected to be substantially free of oxide; and

directing additional Mg, in the presence of oxygen, towards the Mg layer to form a MgO tunnel barrier in contact with the surface, the oxygen reacting with the additional Mg and the Mg layer.

3. The method of claim 2, wherein the Mg layer has a thickness of between 3 and 20 angstroms.

4. The method of claim 2, wherein the MgO tunnel barrier is annealed at a temperature selected to yield a tunneling magnetoresistance of greater than 125% at room temperature.

5. The method of claim 1, said forming the tunnel barrier comprising:

depositing a metal layer onto a surface selected to be substantially free of oxide;

directing additional metal towards the metal layer, in the presence of oxygen, to form a magnesium-zinc oxide tunnel barrier in contact with the surface, the oxygen reacting with the additional metal and the metal layer, wherein;

at least one of the metal layer and the additional metal includes Zn, and

at least one of the metal layer and the additional metal includes Mg.

6. The method of claim 5, wherein the Mg—

ZnO tunnel barrier has a thickness of between 3 and 50 angstroms.

7. The method of claim 1, wherein the tunnel barrier, the first bcc magnetic layer, and the second bcc magnetic layer are each (100) oriented to improve the performance of the tunnel junction.

8. The method of claim 1, wherein each of the tunnel barrier, the first bcc magnetic layer, and the second bcc magnetic layer is polycrystalline.

9. The method of claim 1, wherein each of the tunnel barrier, the first bcc magnetic layer, and the second bcc magnetic layer includes polycrystalline grains whose lateral extent is in the range of 100 to 500 angstroms.

10. The method of claim 1, wherein the first bcc magnetic layer and the second bcc magnetic layer each include two bcc magnetic layers that are exchange coupled by a bcc spacer layer.

11. The method of claim 1, wherein the spacer layer includes Cr.

12. The method of claim 11, wherein the spacer layer is at least 50 atomic % Cr.

13. The method of claim 11, wherein the spacer layer is at least 70 atomic % Cr.

14. The method of claim 11, wherein the spacer layer includes a single-phase, non-ferromagnetic, non-ferrimagnetic alloy of Cr and at least one element selected from the group consisting of V, Nb, Mo, W, and Fe.

15. The method of claim 14, wherein the concentration of said at least one element is selected to lattice match the spacer layer with said two bcc magnetic layers.

16. The method of claim 1, further comprising annealing the tunnel barrier to improve its performance.

17. The method of claim 16, wherein the tunnel barrier is annealed at a temperature greater than 260°

C.

18. The method of claim 16, wherein the tunnel barrier is annealed at a temperature greater than 300°

C.

19. The method of claim 16, wherein the tunnel barrier is annealed at a temperature greater than 340°

C.

20. The method of claim 16, wherein the tunnel barrier is annealed at a temperature in the range of 300°

C. to 400°

C.