ION BEAM TREATMENT FOR THE STRUCTURAL INTEGRITY OF AIR-GAP III-NITRIDE DEVICES PRODUCED BY THE PHOTOELECTROCHEMICAL (PEC) ETCHING
First Claim
1. A method for enhancing structural integrity of a III-nitride opto-electronic or opto-mechanical air-gap nano-structured device, comprising:
- (a) performing an ion beam treatment in a region of the III-nitride opto-electronic or opto-mechanical air-gap nano-structured device, wherein the ion beam treatment locally modifies a material property in the region by making the region resistant to photoelectrochemical (PEC) etching, thereby enhancing the structural integrity; and
(b) performing a band-gap selective PEC etch on the III-nitride opto-electronic or opto-mechanical air-gap nano-structured device, wherein the region is not significantly etched because of the ion beam treatment.
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Abstract
A method for ensuring the structural integrity of III-nitride opto-electronic or opto-mechanical air-gap nano-structured devices, comprising (a) performing ion beam implantation in a region of the III-nitride opto-electronic and opto-mechanical air-gap nano-structured device, wherein the milling significantly locally modifies a material property in the region to provide the structural integrity; and (b) performing a band-gap selective photo-electro-chemical (PEC) etch on the III-nitride opto-electronic and opto-mechanical air-gap nano-structured device. The method can be used to fabricate distributed Bragg reflectors or photonic crystals, for example. The method also comprises the suitable design of distributed Bragg reflector (DBR) structures for the PEC etching and the ion-beam treatment, the suitable design of photonic crystal distributed Bragg reflector (PCDBR) structures for PEC etching and the ion-beam treatment, the suitable placement of protection layers to prevent the ion-beam damage to optical activity and PEC etch selectivity, and a suitable annealing treatment for curing the material quality after the ion-beam treatment.
46 Citations
13 Claims
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1. A method for enhancing structural integrity of a III-nitride opto-electronic or opto-mechanical air-gap nano-structured device, comprising:
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(a) performing an ion beam treatment in a region of the III-nitride opto-electronic or opto-mechanical air-gap nano-structured device, wherein the ion beam treatment locally modifies a material property in the region by making the region resistant to photoelectrochemical (PEC) etching, thereby enhancing the structural integrity; and (b) performing a band-gap selective PEC etch on the III-nitride opto-electronic or opto-mechanical air-gap nano-structured device, wherein the region is not significantly etched because of the ion beam treatment. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A method for enhancing structural integrity of a III-nitride opto-electronic or opto-mechanical air-gap nano-structured device, comprising:
(a) performing an ion beam treatment in a region of the III-nitride opto-electronic or opto-mechanical air-gap nano-structured device, wherein the ion beam treatment locally modifies a material property in the region, thereby enhancing the structural integrity; and
Specification