METHODS, SYSTEMS, AND COMPUTER PROGRAM PRODUCTS FOR PRODUCT RANDOMIZATION AND ANALYSIS IN A MANUFACTURING ENVIRONMENT

• US 20080183321A1
• Filed: 01/30/2007
• Published: 07/31/2008
• Est. Priority Date: 01/30/2007
• Status: Active Grant

• Current Assignee: GlobalFoundries, Inc.
• Original Assignee: International Business Machines Corporation
• Inventors: Rice, James, Song, Yunsheng, Rawlins, Brad J., Cianfrani, Susan M., Long, Christopher W.
• Granted Patent: US 8,015,040 B2
• Time in Patent Office: Days
• US Class Current: 700/96
• CPC Class Codes: G05B 19/41875 characterised by quality surveillance of production
• CPC Class Codes: G05B 2219/32097 Recipe programming for flexible batch
• CPC Class Codes: G05B 2219/32225 Randomize workpiece treatment order within lot to improve lot-to-lot comparisons
• CPC Class Codes: G05B 2219/45031 Manufacturing semiconductor wafers
• CPC Class Codes: G06Q 10/063 Operations research, analysis or management
• CPC Class Codes: Y02P 90/02 Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Abstract

Methods, systems, and computer program products for implementing product randomization and analysis in a manufacturing environment are provided. A method includes processing products for a plurality of lots, at process equipment, using a randomization technique for selecting each product in the lots. The method further including generating an operation identification record for each operation in the process recipe that includes mapping, for each operation, a slot identifier associated with a randomly selected product to a process variable identifier, a process tool, and the operation. The method also includes defining slot groupings using slot identifiers for a product carrier and identifying product yield patterns by analyzing historical yields for each of the slot groupings. The method also includes determining the frequency of occurrence of one or more product yield patterns for each operation in the process recipe by analyzing product yields from the operation identification records corresponding to the plurality of lots.

Claims

1. A method for implementing product randomization and analysis in a manufacturing environment, comprising:

processing products for a plurality of lots, at process equipment, using a randomization technique for selecting each product in the lots, the processing performed in accordance with a process recipe;

generating an operation identification record for each operation in the process recipe, the generating including mapping, for each operation, a slot identifier associated with a randomly selected product to a process variable identifier, a process tool, and the operation;

defining slot grouping using slot identifiers for a product carrier of each of the plurality of lots;

identifying product yield patterns by analyzing historical yields for each of the slot groupings; and

determining the frequency of occurrence of one or more product yield patterns for each operation in the process recipe by analyzing product yields from the operation identification records corresponding to the plurality of lots.

2. The method of claim 1, wherein the slot groupings are defined using a sequentially ordered listing of slot identifiers, wherein defined slot groupings include at least one of:

a slot identifier corresponding to the first physical slot in the product carrier;

a slot identifier corresponding to the last physical slot in the product carrier;

front and back groupings, where the front grouping represents slot identifiers corresponding to slots located in an upper half of the product carrier, and the back grouping represents slot identifiers corresponding to slots located in a lower half of the product carrier;

odd and even groupings, where the odd grouping represents odd-numbered slot identifiers and the even grouping represents even-numbered slot identifiers for the product carrier;

every third slot corresponding to every third slot identifier in the sequentially ordered listing; and

every fourth slot corresponding to every fourth slot identifier in the sequentially ordered listing.

3. The method of claim 1, further comprising:

graphically displaying the product yield patterns, the product yield patterns reflecting potential issues relating to at least one of an operation, a tool, a product carrier, and a product;

wherein determining the frequency of occurrence of a pattern includes comparing results of product yield analysis for each operation with each of the yield patterns.

4. The method of claim 1, wherein the randomization technique is logical.

5. The method of claim 1, wherein the randomization technique is physical;

wherein further, the process order variable for each randomly selected product is equal to the slot identifier.

6. The method of claim 1, wherein the randomization technique is combined logical and physical;

wherein;

the process order variable specifies a process sequence for the product when the logical randomization technique is used; and

the process order variable for the product is equal to the slot identifier when the physical randomization technique is used.

7. The method of claim 1, wherein the process order variable specifies a process sequence for the product.

8. A system for implementing product randomization and analysis in a manufacturing environment, comprising:

a host system; and

a product randomization application executing on the host system, the product randomization application implementing a method, comprising;

processing products for a plurality of lots, at process equipment, using a randomization technique for selecting each product in the lots, the processing performed in accordance with a process recipe;

generating an operation identification record for each operation in the process recipe, the generating including mapping, for each operation, a slot identifier associated with a randomly selected product to a process variable identifier, a process tool, and the operation;

defining slot groupings using slot identifiers for a product carrier of each of the plurality of lots;

identifying product yield patterns by analyzing historical yields for each of the slot groupings; and

determining the frequency of occurrence of one or more product yield patterns for each operation in the process recipe by analyzing product yields from the operation identification records corresponding to the plurality of lots.

9. The system of claim 8, wherein the slot groupings are defined using a sequentially ordered listing of slot identifiers, wherein defined slot groupings include at least one of:

a slot identifier corresponding to the first physical slot in the product carrier;

a slot identifier corresponding to the last physical slot in the product carrier;

front and back groupings, where the front grouping represents slot identifiers corresponding to slots located in an upper half of the product carrier, and the back grouping represents slot identifiers corresponding to slots located in a lower half of the product carrier;

odd and even groupings, where the odd grouping represents odd-numbered slot identifiers and the even grouping represents even-numbered slot identifiers for the product carrier;

every third slot corresponding to every third slot identifier in the sequentially ordered listing; and

every fourth slot corresponding to every fourth slot identifier in the sequentially ordered listing.

10. The system of claim 8, wherein the product randomization application further performs:

graphically displaying the product yield patterns, the product yield patterns reflecting potential issues relating to at least one of an operation, a tool, a product carrier, and a product;

wherein determining the frequency of occurrence of a pattern includes comparing results of product yield analysis for each operation with each of the yield patterns.

12. The system of claim 8, wherein the randomization technique is physical;

wherein further, the process order variable for each randomly selected product is equal to the slot identifier.

13. The system of claim 8, wherein the randomization technique is combined logical and physical;

wherein;

the process order variable specifies a process sequence for the product when the logical randomization technique is used; and

the process order variable for the product is equal to the slot identifier when the physical randomization technique is used.

11. The system of clam 8, wherein the randomization technique is logical.

14. A computer program product for implementing product randomization and analysis in a manufacturing environment, the computer program product including instructions for implementing a method, comprising:

processing products for a plurality of lots, at process equipment, using a randomization technique for selecting each product in the lots, the processing performed in accordance with a process recipe;

generating an operation identification record for each operation in the process recipe, the generating including mapping, for each operation, a slot identifier associated with a randomly selected product to a process variable identifier, a process tool, and the operation;

defining slot groupings using slot identifiers for a product carrier of each of the plurality of lots;

identifying product yield patterns by analyzing historical yields for each of the slot groupings; and

determining the frequency of occurrence of one or more product yield patterns for each operation in the process recipe by analyzing product yields from the operation identification records corresponding to the plurality of lots.

15. The computer program product of claim 14, wherein the slot groupings are defined using a sequentially ordered listing of slot identifiers, wherein defined slot groupings include at least one of:

a slot identifier corresponding to the first physical slot in the product carrier;

a slot identifier corresponding to the last physical slot in the product carrier;

front and back groupings, where the front grouping represents slot identifiers corresponding to slots located in an upper half of the product carrier, and the back grouping represents slot identifiers corresponding to the slots located in a lower half of the product carrier;

odd and even groupings, where the odd grouping represents odd-numbered slot identifiers and the even grouping represents even-numbered slot identifiers for the product carrier;

every third slot corresponding to every third slot identifier in the sequentially ordered listing; and

every fourth slot corresponding to every fourth slot identifier in the sequentially ordered listing.

16. The computer program product of claim 14, further comprising instructions for implementing:

graphically displaying the product yield patterns, the product yield patterns reflecting potential issues relating to at least one of an operation, a tool, a product carrier, and a product;

wherein determining the frequency of occurrence of a pattern includes comparing results of product yield analysis for each operation with each of the yield patterns.

17. The computer program product of claim 14, wherein the randomization technique is logical.

18. The computer program product of claim 14, wherein the randomization technique is physical, wherein further, the process order variable for each randomly selected product is equal to the slot identifier.

19. The computer program product of claim 14, wherein the randomization technique is combined logical and physical;

wherein;

the process order variable specifies a process sequence for the product when the logical randomization technique is used; and

the process order variable for the product is equal to the slot identifier when the physical randomization technique is used.

20. The computer program product of claim 14, wherein the process order variable specifies a process sequence for the product.