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Methods and apparatus for depositing nanoparticles on a substrate

  • US 20080187657A1
  • Filed: 09/18/2007
  • Published: 08/07/2008
  • Est. Priority Date: 09/19/2006
  • Status: Active Grant
First Claim
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1. A method for depositing nanoparticles upon a deposition substrate, comprising:

  • providing a container assembly comprising;

    a deposition chamber having an outer wall, an inner wall, an inner space, and upper end and a lower end, and the inner space having an upper level and a lower level positioned below the upper level;

    a nanomaterial feeding container for containing a nanomaterial; and

    a nanomaterial mixing and ejection device for mixing the nanomaterial from the nanomaterial feeding container and ejecting the mixed nanomaterial through an ejection orifice into the inner space of the deposition chamber at a level below the upper level of the inner space;

    positioning a deposition substrate within the upper level of the inner space of the deposition chamber, the deposition substrate having an exposed surface, and wherein the exposed surface of the deposition substrate is positioned in the upper level of the inner space above the ejection orifice;

    depositing the nanomaterial into the nanomaterial feeding container; and

    feeding the nanomaterial into the nanomaterial mixing and ejection device wherein the nanomaterial is mixed and wherein after mixing, the nanomaterial is ejected into the inner space of the deposition chamber as particles comprising nanoparticles and nanomaterial clusters forming a suspension of nanoparticles in the upper level of the inner space wherein nanoparticles from the suspension of nanoparticles become deposited on the exposed surface of the deposition substrate such that nanoparticles are the primary particles deposited on the exposed surface of the deposition substrate and nanomaterial clusters primarily settle in the lower level of the inner space.

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