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APPARATUS AND METHOD OF TEMPERATURE CONROL DURING CLEAVING PROCESSES OF THICK FILM MATERIALS

  • US 20080188011A1
  • Filed: 01/24/2008
  • Published: 08/07/2008
  • Est. Priority Date: 01/26/2007
  • Status: Abandoned Application
First Claim
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1. An apparatus for temperature control of manufacture of thick film materials, the apparatus comprising:

  • a stage comprising a planar surface for supporting a bulk material to be implanted, the bulk material having a surface region, a side region, and a bottom region, the side region, bottom region, and the surface region providing a volume of material, the volume of material having a length defined between the bottom region and the surface region;

    a mechanical clamp device adapted to engage the bottom region of the bulk material to the planar surface of the stage such that the bulk material is in physical contact with the planar surface for thermal energy to transfer through an interface region between the bulk material and the planar surface of the stage while the surface region of the bulk material is substantially exposed;

    a sensor device configured to measure a temperature value of the surface region, the sensor device being adapted to generate an input data;

    an implant device configured to perform implantation of a plurality of particles through one or more portions of the surface region of the bulk material; and

    a controller configured to receive the input data and process the input data to increase and/or decrease the temperature value of the surface region of the bulk material through at least the interface region between the planar surface of the stage and the bottom region of the bulk material.

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