METHOD FOR FORMING CAPACITOR OF SEMICONDUCTOR DEVICE
First Claim
1. A method for forming a capacitor of a semiconductor device, comprising the steps of:
- forming a first sacrificial insulation layer and a second sacrificial insulation layer over a semiconductor substrate which is divided into a first region and a second region;
etching the second sacrificial insulation layer and the first sacrificial insulation layer in the first region to define holes in the first region of the semiconductor substrate;
forming storage nodes on surfaces of the holes;
etching a partial thickness of the second sacrificial insulation layer to partially expose upper portions of the storage nodes;
forming a mask pattern selectively covering the first region on the etched second sacrificial insulation layer, wherein the second sacrificial insulation layer remaining in the second region is not covered by the mask pattern;
removing the remained second sacrificial insulation layer in the second region to expose the first sacrificial insulation layer in the second region;
removing the exposed first sacrificial insulation layer in the second region and the first sacrificial insulation layer in the first region;
removing the mask pattern; and
removing the second sacrificial insulation layer remaining in the first region.
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Abstract
A method for forming a capacitor of a semiconductor device includes the steps of forming first and second sacrificial insulation layers over a semiconductor substrate divided into first and second regions. The second and first sacrificial insulation layers in the first region are etched to define in the first region of the semiconductor substrate. Storage nodes on surfaces of the holes are formed. A partial thickness of the second sacrificial insulation layer is etched to partially expose upper portions of the storage nodes. A mask pattern is formed to cover the first region while exposing the second sacrificial insulation layer remaining in the second region. The exposed second sacrificial insulation layer in the second region is removed to expose the first sacrificial insulation layer in the second region. The exposed first sacrificial insulation layer in the second region and the first sacrificial insulation layer in the first region is removed. The mask pattern is removed. The second sacrificial insulation layer remaining in the first region is removed.
31 Citations
16 Claims
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1. A method for forming a capacitor of a semiconductor device, comprising the steps of:
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forming a first sacrificial insulation layer and a second sacrificial insulation layer over a semiconductor substrate which is divided into a first region and a second region; etching the second sacrificial insulation layer and the first sacrificial insulation layer in the first region to define holes in the first region of the semiconductor substrate; forming storage nodes on surfaces of the holes; etching a partial thickness of the second sacrificial insulation layer to partially expose upper portions of the storage nodes; forming a mask pattern selectively covering the first region on the etched second sacrificial insulation layer, wherein the second sacrificial insulation layer remaining in the second region is not covered by the mask pattern; removing the remained second sacrificial insulation layer in the second region to expose the first sacrificial insulation layer in the second region; removing the exposed first sacrificial insulation layer in the second region and the first sacrificial insulation layer in the first region; removing the mask pattern; and removing the second sacrificial insulation layer remaining in the first region. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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Specification