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MICROELECTROMECHANICAL GYROSCOPE WITH SUPPRESSION OF CAPACITIVE COUPLING SPURIOUS SIGNALS AND CONTROL METHOD

  • US 20080190198A1
  • Filed: 02/13/2008
  • Published: 08/14/2008
  • Est. Priority Date: 02/13/2007
  • Status: Active Grant
First Claim
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1. A microelectromechanical gyroscope comprising:

  • a microstructure, including a first mass and a second mass, wherein the first mass is oscillatable according to a first axis with a resonance frequency and the second mass is constrained to the first mass so as to be drawn along by the first mass according to the first axis and to oscillate according to a second axis in response to a rotation of the microstructure; and

    a driving device, coupled to the microstructure so as to form a feedback control loop that includes the first mass and configured to maintain the first mass in oscillation at the resonance frequency;

    wherein the driving device comprises a low-pass filter having a passband of frequencies such that the resonance frequency is in the passband and a disturbance frequency associated with disturbance signals due to electrical coupling between the first mass and the second mass is not in the passband.

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