MEMS DEVICE FABRICATED ON A PRE-PATTERNED SUBSTRATE
First Claim
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1. A microelectromechanical systems (MEMS) device, comprising:
- a substrate including a top surface and a plurality of trenches formed in the top surface, the trenches being spaced from one another;
a first electrode layer formed over the top surface of the substrate, wherein the first electrode layer is discontinuous at the trenches to thereby separate the first electrode layer into a plurality of portions; and
a second electrode formed over the first electrode, the second electrode being separated from the first electrode by a cavity.
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Abstract
A microelectromechanical systems device fabricated on a pre-patterned substrate having grooves formed therein. A lower electrode is deposited over the substrate and separated by an orthogonal upper electrode by a cavity. The upper electrode is configured to be movable to modulate light.
89 Citations
27 Claims
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1. A microelectromechanical systems (MEMS) device, comprising:
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a substrate including a top surface and a plurality of trenches formed in the top surface, the trenches being spaced from one another; a first electrode layer formed over the top surface of the substrate, wherein the first electrode layer is discontinuous at the trenches to thereby separate the first electrode layer into a plurality of portions; and a second electrode formed over the first electrode, the second electrode being separated from the first electrode by a cavity. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A microelectromechanical systems (MEMS) device, comprising a substrate having a top surface and a plurality of grooves formed in the top surface;
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a plurality of first electrode strips formed over the top surface of the substrate and electrically separated from one another by the grooves; and a second electrode formed over the first electrode strips and separated from the first electrode strips by cavities. - View Dependent Claims (16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27)
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Specification