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MEMS DEVICE FABRICATED ON A PRE-PATTERNED SUBSTRATE

  • US 20080192329A1
  • Filed: 04/16/2008
  • Published: 08/14/2008
  • Est. Priority Date: 09/27/2004
  • Status: Active Grant
First Claim
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1. A microelectromechanical systems (MEMS) device, comprising:

  • a substrate including a top surface and a plurality of trenches formed in the top surface, the trenches being spaced from one another;

    a first electrode layer formed over the top surface of the substrate, wherein the first electrode layer is discontinuous at the trenches to thereby separate the first electrode layer into a plurality of portions; and

    a second electrode formed over the first electrode, the second electrode being separated from the first electrode by a cavity.

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