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INERTIAL SENSOR AND MANUFACTURING METHOD OF THE SAME

  • US 20080196502A1
  • Filed: 06/15/2007
  • Published: 08/21/2008
  • Est. Priority Date: 06/30/2006
  • Status: Active Grant
First Claim
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1. An inertial sensor comprising:

  • (a) a cavity portion formed on a substrate;

    (b) a weight suspended in the cavity portion via an elastically deformable elastic body; and

    (c) a fixed electrode provided in the cavity portion,wherein a position change of the weight due to an acceleration is detected on the basis of a change of an electrostatic capacitance between the weight and the fixed electrode, andthe weight is divided into a plurality of divided weights, and each of the plurality of divided weights is connected to each other by elastically deformable elastic bodies.

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