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SPATIAL LIGHT MODULATOR WITH MULTI-LAYER LANDING STRUCTURES

  • US 20080196814A1
  • Filed: 03/26/2008
  • Published: 08/21/2008
  • Est. Priority Date: 10/13/2005
  • Status: Active Grant
First Claim
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1. A method of fabricating a spatial light modulator, the method comprising:

  • providing a first substrate including a first bonding surface;

    forming a first layer coupled to the bonding surface, the first layer characterized by a first set of material parameters;

    forming a second layer coupled to the first layer, the second layer characterized by a second set of material parameters;

    patterning the first layer and the second layer to form a plurality of landing structures extending to a first distance from the bonding surface of the first substrate;

    providing a second substrate including a second bonding surface;

    joining the first bonding surface of the first substrate to the second bonding surface of the second substrate; and

    forming a plurality of moveable mirrors from the second substrate, wherein the moveable mirrors make contact with the second layer during operation of the spatial light modulator.

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