Sensor semiconductor device and manufacturing method thereof
First Claim
1. A manufacturing method for a sensor semiconductor device, comprising the steps of:
- providing a wafer having a plurality of sensor chips, wherein each of the sensor chips has an active surface and a non-active surface opposite thereto, a sensing area and a plurality of bond pads are provided on the active surface, and a plurality of grooves are formed between the bond pads on the active surfaces of adjacent ones of the sensor chips;
forming conductive traces in the grooves for electrically connecting the bond pads on the active surfaces of adjacent ones of the sensor chips;
mounting a transparent medium on the sensor chips for covering the sensing area of the sensor chip;
thinning the sensor chips from the non-active surfaces down to the grooves, thereby exposing the conductive traces from the non-active surface;
cutting the wafer along borders between the sensor chips, such that the sensor chips each laterally formed with the conductive traces are separated from one another;
mounting the sensor chips on a substrate module having a plurality of substrates aligned in matrix, and electrically connecting the conductive traces of the sensor chips to the substrates;
providing an insulation material on the substrate module and between the sensor chips so as to encapsulate the sensor chips but expose the transparent medium; and
cutting the substrate module along borders between the substrates, so as to separate a plurality of sensor semiconductor devices from one another.
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Accused Products
Abstract
This invention discloses a sensor semiconductor device and a manufacturing method thereof, including: providing a wafer having a plurality of sensor chips, forming a plurality of grooves between bond pads on active surfaces of the adjacent sensor chips; forming conductive traces in the grooves for electrically connecting the bond pads; mounting a transparent medium on the wafer for covering sensing areas of the sensor chips; thinning the sensor chips from the non-active surfaces down to the grooves, thereby exposing the conductive traces; cutting the wafer to separate the sensor chips; mounting the sensor chips on a substrate module having a plurality of substrates, electrically connecting the conductive traces to the substrates; providing an insulation material on the substrate module and between the sensor chips so as to encapsulate the sensor chips but expose the transparent medium; and cutting the substrate module to separate a plurality of resultant sensor semiconductor devices.
12 Citations
12 Claims
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1. A manufacturing method for a sensor semiconductor device, comprising the steps of:
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providing a wafer having a plurality of sensor chips, wherein each of the sensor chips has an active surface and a non-active surface opposite thereto, a sensing area and a plurality of bond pads are provided on the active surface, and a plurality of grooves are formed between the bond pads on the active surfaces of adjacent ones of the sensor chips; forming conductive traces in the grooves for electrically connecting the bond pads on the active surfaces of adjacent ones of the sensor chips; mounting a transparent medium on the sensor chips for covering the sensing area of the sensor chip; thinning the sensor chips from the non-active surfaces down to the grooves, thereby exposing the conductive traces from the non-active surface; cutting the wafer along borders between the sensor chips, such that the sensor chips each laterally formed with the conductive traces are separated from one another; mounting the sensor chips on a substrate module having a plurality of substrates aligned in matrix, and electrically connecting the conductive traces of the sensor chips to the substrates; providing an insulation material on the substrate module and between the sensor chips so as to encapsulate the sensor chips but expose the transparent medium; and cutting the substrate module along borders between the substrates, so as to separate a plurality of sensor semiconductor devices from one another. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A sensor semiconductor device, comprising:
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a substrate; a sensor chip having an active surface and a non-active surface opposite to the active surface, wherein a sensing area and a plurality of bond pads are formed on the active surface, and conductive traces extended to and electrically connected to the bond pads are formed at the flanks of the sensor chip, thereby allowing the conductive traces to be electrically connected to the substrate through an electrical conduction material; a transparent medium formed on the active surface of the sensor chip for covering the sensing area; and an insulation material for encapsulating the sensor chip but exposing the transparent medium. - View Dependent Claims (8, 9, 10, 11, 12)
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Specification