SEMICONDUCTOR COMPONENT WITH CELL STRUCTURE AND METHOD FOR PRODUCING THE SAME
First Claim
1. A semiconductor component having a semiconductor body comprising:
- a first component electrode arranged on the semiconductor body;
a second component electrode arranged on the semiconductor body;
a component control electrode arranged on the semiconductor body;
active semiconductor element cells arranged in a first active cell array of the semiconductor body and the semiconductor element cells comprising;
a first cell electrode;
a second cell electrode;
a cell control electrode;
a drift path between the cell electrodes; and
a partial region of the semiconductor body on which at least the component control electrode is arranged, and wherein at least one second active cell array is arranged in the partial region of the semiconductor body below the component control electrode.
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Accused Products
Abstract
A semiconductor component comprises a semiconductor body comprising a first component electrode arranged on one of the surfaces of the semiconductor body, a second component electrode arranged on one of the surfaces of the semiconductor body, and a component control electrode arranged on one of the surfaces of the semiconductor body. In this case, active semiconductor element cells are arranged in a first active cell array of the semiconductor body, the semiconductor element cells comprising a first cell electrode, a second cell electrode and a cell control electrode and also a drift path between the cell electrodes. At least the component control electrode is arranged on a partial region of the semiconductor body and a second active cell array is additionally situated in the partial region of the semiconductor body below the component control electrode.
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Citations
24 Claims
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1. A semiconductor component having a semiconductor body comprising:
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a first component electrode arranged on the semiconductor body; a second component electrode arranged on the semiconductor body; a component control electrode arranged on the semiconductor body; active semiconductor element cells arranged in a first active cell array of the semiconductor body and the semiconductor element cells comprising; a first cell electrode; a second cell electrode; a cell control electrode; a drift path between the cell electrodes; and a partial region of the semiconductor body on which at least the component control electrode is arranged, and wherein at least one second active cell array is arranged in the partial region of the semiconductor body below the component control electrode. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A method for producing a plurality of semiconductor chips for semiconductor components with cell structures, comprising:
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patterning a semiconductor wafer composed of a monocrystalline semiconductor body with cell structures for MOSFETs, IGBTs or JFETs with a lateral or vertical drift path arranged between a first region of the semiconductor body for a first cell electrode and a second region of the semiconductor body for a second cell electrode, wherein the first region has a surrounding body zone with semiconductor material doped complementarily to the drift path, which body zone can be activated by a cell control electrode in interaction with a component control electrode; arranging the cell structures in semiconductor chip positions to form a first active cell array provided below a first or a second component electrode; and arranging the cell structures in at least one partial region of the semiconductor chip positions to form a second active cell array of the partial region, the array being provided below a component control electrode. - View Dependent Claims (16, 17, 18, 19, 20, 21, 22, 23, 24)
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Specification