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Micro-Electro-Mechanical Transducers

  • US 20080197751A1
  • Filed: 05/18/2006
  • Published: 08/21/2008
  • Est. Priority Date: 05/18/2005
  • Status: Active Grant
First Claim
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1. A micro-electro-mechanical transducer having a movable mechanical part to transform energy, the transducer comprising:

  • a substrate;

    a middle spring layer placed over the substrate, the substrate and the middle spring layer defining a first cavity and a second cavity therebetween, the first cavity and the second cavity sharing a standing feature including a first sidewall bordering the first cavity and an opposing second sidewall bordering the second cavity, wherein the middle spring layer has a first portion connected to the first sidewall and covering at least a part of the first cavity, and a second portion connected to the second sidewall and covering at least a part of the second cavity;

    a first connector having a connector height on the first portion of the middle spring layer, the first connector being horizontally distanced from the first sidewall by a sufficient length such that the first portion of the middle spring layer between the first connector and the first sidewall defines a first cantilever anchored at the first sidewall;

    a second connector having substantially the same connector height on the second portion of the middle spring layer, the second connector being horizontally distanced from the second sidewall by a sufficient length such that the second portion of the middle spring layer between the second connector and the second sidewall defines a second cantilever anchored at the second sidewall; and

    a top plate placed over the first connector and the second connector, the connectors separating the top plate from the middle spring layer to define a transducing space below the top plate,wherein the first cantilever and the first cavity enable a vertical displacement of the first connector, and the second cantilever and the second cavity enable a vertical displacement of the second connector, the vertical displacements of the connectors transporting the top plate substantially vertically, thus changing the transducing space and activating a transducing member in the transducer for energy transformation.

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