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Harmonic Derived Arc Detector

  • US 20080197854A1
  • Filed: 02/16/2007
  • Published: 08/21/2008
  • Est. Priority Date: 02/16/2007
  • Status: Active Grant
First Claim
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1. An arc detection system, comprising:

  • a radio frequency (RF) signal probe that senses a RF signal at an input of a RF plasma chamber and that generates a signal based on at least one of the voltage, current, and power of the RF signal; and

    a signal analyzer that receives the signal, monitors the signal for frequency components that have a higher frequency than a fundamental frequency of the RF signal, and that generates an output signal based on the frequency components wherein the output signal indicates that an arc is occurring in the RF plasma chamber.

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