METHOD OF MANUFACTURING DIELECTRIC LAYER AND METHOD OF MANUFACTURING LIQUID JET HEAD

• US 20080199599A1
• Filed: 04/10/2008
• Published: 08/21/2008
• Est. Priority Date: 12/11/2003
• Status: Active Grant

• Current Assignee: Seiko Epson Corporation (Seiko Group)
• Original Assignee: Seiko Epson Corporation (Seiko Group)
• Inventors: Kazama, Hironobu, Kuriki, Akira, Sumi, Koji, Shinbo, Toshinao
• Granted Patent: US 8,003,161 B2
• Time in Patent Office: Days
• US Class Current: 427/100
• CPC Class Codes: B41J 2/161 of film type, deformed by bending and disposed on a diaphragm
• CPC Class Codes: B41J 2/1628 dry etching
• CPC Class Codes: B41J 2/164 thin film formation
• CPC Class Codes: C23C 18/1216 Metal oxides C23C18/1212 takes precedence
• CPC Class Codes: C23C 18/1225 Deposition of multilayers of inorganic material
• CPC Class Codes: C23C 18/1245 Inorganic substrates other than metallic
• CPC Class Codes: C23C 18/1254 Sol or sol-gel processing
• CPC Class Codes: C23C 18/1283 Control of temperature, e.g. gradual temperature increase, modulation of temperature
• CPC Class Codes: H10N 30/078 by sol-gel deposition
• CPC Class Codes: H10N 30/8554 Lead zirconium titanate based
• CPC Class Codes: Y10T 29/42 Piezoelectric device making

Abstract

A method of manufacturing a dielectric film includes a coating step of coating sol made of an organic metal compound and forming a dielectric precursor film, a drying step of drying the dielectric precursor film, a degreasing step of degreasing the dielectric precursor film, and a baking step of baking the dielectric precursor film to form a dielectric film. The drying step includes a first drying step of drying the dielectric precursor film by heating the dielectric precursor film to a temperature lower than a boiling point of a solvent which is a main solvent of the sol and then holding the dielectric precursor film at the temperature for a predetermined period of time, and a second drying step of drying the dielectric precursor film further by reheating the dielectric precursor film and then holding the dielectric precursor film at the temperature for a predetermined period of time.

Claims

1. A method of manufacturing a liquid jet head comprising the step of:

forming a piezoelectric element, in a region opposed to each pressure generating chamber communicating with each nozzle orifice for ejecting a droplet, through a vibration plate constituting one side of the pressure generating chamber,

wherein the step of forming a piezoelectric element includes the steps of;

forming a lower electrode film on the vibration plate;

forming a piezoelectric layer on the lower electrode film; and

forming an upper electrode film on the piezoelectric layer, and

wherein the piezoelectric layer composed of a plurality of piezoelectric films is laminated by repeatedly performing a piezoelectric layer forming process of;

a step of coating sol made of an organic metal compound and forming a piezoelectric precursor film;

a first drying step of drying the piezoelectric precursor film by heating the piezoelectric precursor film to a temperature lower than a boiling point of a solvent which is a main solvent of the sol and then holding the piezoelectric precursor film at the temperature for a predetermined period of time;

a second drying step of further drying the piezoelectric precursor film by heating the piezoelectric precursor film to a temperature equal to or higher than the boiling point of the solvent and then holding the piezoelectric precursor film at the temperature for a predetermined period of time;

a degreasing step of degreasing the piezoelectric precursor film by heating the piezoelectric precursor film to a temperature higher than the boiling point of the solvent; and

a baking step of baking the piezoelectric precursor film to crystallize the piezoelectric precursor film into the piezoelectric film.

2. The method of manufacturing a liquid jet head according to claim 1,

wherein the method includes the first drying step, the second drying step, the degreasing step, and the baking step independently.

3. The method of manufacturing a liquid jet head according to claim 1,

wherein heating is continuously performed without lowering the temperature in at least two consecutive steps out of the first drying step, the second drying step, the degreasing step, and the baking step.