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PRESSURE SENSOR

  • US 20080202248A1
  • Filed: 02/22/2008
  • Published: 08/28/2008
  • Est. Priority Date: 02/28/2007
  • Status: Active Grant
First Claim
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1. A pressure sensor comprising a diaphragm formed on a portion of a chip made of semiconductor material and sensing pressure acting on the diaphragm by electrically converting the displacement corresponding to that pressure, wherein:

  • the diaphragm is provided with an aspect ratio of at least a size such that the derivative of the characteristic curve of the allowable pressure resistance of the pressure sensor, defined by setting the aspect ratio obtained by dividing the length of one side of the diaphragm by the thickness of the diaphragm as the horizontal axis and by setting the allowable pressure resistance of the pressure sensor as the vertical axis, becomes nearly zero.

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