Capacitive pressure sensor
First Claim
1. A capacitive pressure sensor, comprising a first capacitor electrode and a second capacitor electrode spaced from the first capacitor electrode, said first and second capacitor electrodes being resiliently brought closer together under the action of a compressive force acting on the pressure sensor,wherein said capacitive pressure sensor comprises a laminated arrangement with a first flexible, electrically insulating carrier film carrying said first capacitor electrode, a second flexible, electrically insulating carrier film carrying said second capacitor electrode and a flexible, electrically insulating spacer film sandwiched between said first and second carrier films, said spacer film having a through-hole or recess therein, with respect to which said first and second capacitor electrodes are arranged opposite one another in such a way that said first and second electrodes are brought closer together by resilient bending of said first and/or second carrier film into said through-hole or recess under the action of a compressive force acting on the pressure sensor.
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Accused Products
Abstract
A capacitive pressure comprises a laminated arrangement with a first flexible, electrically insulating carrier film carrying a first capacitor electrode, a second flexible, electrically insulating carrier film carrying a second capacitor electrode and a flexible, electrically insulating spacer film sandwiched between the first and second carrier films. The spacer film has a through-hole or recess therein, with respect to which the first and second capacitor electrodes are arranged opposite one another, in such a way that the first and second electrodes are brought closer together by resilient bending of the first and/or second carrier film into the through-hole or recess under the action of a compressive force acting on the pressure sensor.
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Citations
12 Claims
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1. A capacitive pressure sensor, comprising a first capacitor electrode and a second capacitor electrode spaced from the first capacitor electrode, said first and second capacitor electrodes being resiliently brought closer together under the action of a compressive force acting on the pressure sensor,
wherein said capacitive pressure sensor comprises a laminated arrangement with a first flexible, electrically insulating carrier film carrying said first capacitor electrode, a second flexible, electrically insulating carrier film carrying said second capacitor electrode and a flexible, electrically insulating spacer film sandwiched between said first and second carrier films, said spacer film having a through-hole or recess therein, with respect to which said first and second capacitor electrodes are arranged opposite one another in such a way that said first and second electrodes are brought closer together by resilient bending of said first and/or second carrier film into said through-hole or recess under the action of a compressive force acting on the pressure sensor.
Specification