MEMS SHOCK SENSORS
First Claim
1. A shock sensor comprising:
- a substrate; and
at least one flexure coupled to the substrate and configured to deflect upon an application of force to the shock sensor sufficient to deflect the flexure,wherein deflection of the at least one flexure produces a detectable change in an electrical property of the shock sensor.
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Accused Products
Abstract
A shock sensor comprises a substrate and at least one flexure coupled to the substrate and configured to deflect upon an application of force to the shock sensor sufficient to deflect the flexure. Deflection of the at least one flexure produces a detectable change in an electrical property of the shock sensor. Examples of detectable changes in an electrical property of the shock sensor include an open circuit condition, a closed circuit condition, and a variation in voltage of a piezo-electric detector. In some embodiments, the change in the electrical property of the shock sensor may be remotely read by interrogation of a radio frequency identification transponder positioned on the substrate using a remote radio frequency identification transceiver. The disclosure also relates to a shock sensing system and method of shock detection.
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Citations
30 Claims
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1. A shock sensor comprising:
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a substrate; and at least one flexure coupled to the substrate and configured to deflect upon an application of force to the shock sensor sufficient to deflect the flexure, wherein deflection of the at least one flexure produces a detectable change in an electrical property of the shock sensor. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24)
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25. A shock sensor comprising:
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an electrically conductive member; and at least two electrically conductive flexures configured to electrically connect to the electrically conductive member; a detector; and an radio frequency identification (RFID) transponder coupled to the detector, wherein each flexure is configured to produce a electrical circuit condition upon an application of force to the shock sensor, the force being sufficient to deflect the flexure and the force being different for at least two of the flexures, and wherein the detector is configured to detect the electrical circuit condition and communicate the electrical circuit condition to the RFID transponder.
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26. A method comprising:
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exposing a shock sensor to a force, the shock sensor comprising at least one flexure configured to deflect upon an application of a sufficient force to the shock sensor, wherein deflection of the at least one flexure produces a change in an electrical property of the shock sensor; and detecting the electrical property of the shock sensor to determine a magnitude of the force. - View Dependent Claims (27, 28, 29, 30)
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Specification