CLEANING MEMBER, CLEANING METHOD, AND DEVICE MANUFACTURING METHOD
First Claim
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1. A cleaning member for cleaning at least part of a substrate-holding member that holds a rear face of a substrate onto which exposure light is irradiated, the cleaning member being held by the substrate-holding member, and having an outer diameter that is smaller than the substrate.
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Abstract
A cleaning member is smaller than a substrate for exposure where exposure light is irradiated, and at least part of a substrate-holding member that holds a rear face of the substrate for exposure is held by the substrate-holding member in order to clean.
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Citations
26 Claims
- 1. A cleaning member for cleaning at least part of a substrate-holding member that holds a rear face of a substrate onto which exposure light is irradiated, the cleaning member being held by the substrate-holding member, and having an outer diameter that is smaller than the substrate.
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9. A cleaning method of cleaning at least part of a substrate-holding member that holds a substrate onto which exposure light is irradiated, the method comprising:
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holding a cleaning member with the substrate-holding member, the cleaning member having substantially the same external shape as the substrate, and an outer diameter that is smaller than the substrate; and supplying a liquid that is used for cleaning at least part of the substrate-holding member. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26)
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Specification