FIELD EFFECT TRANSISTOR HAVING AN INTERLAYER DIELECTRIC MATERIAL HAVING INCREASED INTRINSIC STRESS
First Claim
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1. A method, comprising:
- forming a first etch stop layer above a P-channel transistor; and
forming an interlayer dielectric material above said first etch stop layer, said interlayer dielectric material comprising at least a layer portion having a compressive stress of approximately 400 MPa (Mega Pascal) or higher.
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Abstract
By providing a highly stressed interlayer dielectric material, the performance of at least one type of transistor may be increased due to an enhanced strain-inducing mechanism. For instance, by providing a highly compressive silicon dioxide of approximately 400 Mega Pascal and more as an interlayer dielectric material, the drive current of the P-channel transistors may be increased by 2% and more while not unduly affecting the performance of the N-channel transistors.
395 Citations
22 Claims
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1. A method, comprising:
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forming a first etch stop layer above a P-channel transistor; and forming an interlayer dielectric material above said first etch stop layer, said interlayer dielectric material comprising at least a layer portion having a compressive stress of approximately 400 MPa (Mega Pascal) or higher. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A method, comprising:
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forming a first etch stop layer above a first transistor; forming a second etch stop layer above a second transistor, said first and second etch stop layers having at least one of a different amount and type of intrinsic stress; and forming an interlayer dielectric material above said first and second etch stop layers, said interlayer dielectric material comprising a portion located above said first transistor and having an intrinsic stress level selected to adjust a strain level in a channel region of said first transistor. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19)
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20. A semiconductor device, comprising:
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a first transistor; a first etch stop layer formed above said first transistor; and a first interlayer dielectric material formed on said first etch stop layer, said interlayer dielectric material having an intrinsic stress level above said first transistor of approximately 400 Mega Pascal or higher. - View Dependent Claims (21, 22)
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Specification