Method, program product and apparatus for generating a calibrated pupil kernel and method of using the same in a lithography simulation process
First Claim
Patent Images
1. A method of generating a model for simulating the imaging performance of an optical imaging system having a pupil;
- said method comprising the steps of;
defining said optical imaging system and a process to be utilized by said optical imaging system; and
defining a model equation representing the imaging performance of said optical imaging system and said process, said model equation including a calibrated pupil kernel;
wherein said calibrated pupil kernel represents a linear model of the pupil performance.
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Abstract
A method of generating a model for simulating the imaging performance of an optical imaging system having a pupil. The method includes the steps of defining the optical imaging system and a process to be utilized by the optical imaging system; and defining a model equation representing the imaging performance of the optical imaging system and the process, where the model equation including a calibrated pupil kernel. The calibrated pupil kernel representing a linear model of the pupil performance.
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Citations
9 Claims
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1. A method of generating a model for simulating the imaging performance of an optical imaging system having a pupil;
- said method comprising the steps of;
defining said optical imaging system and a process to be utilized by said optical imaging system; and defining a model equation representing the imaging performance of said optical imaging system and said process, said model equation including a calibrated pupil kernel; wherein said calibrated pupil kernel represents a linear model of the pupil performance. - View Dependent Claims (2, 3)
- said method comprising the steps of;
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4. A method of simulating the imaging performance of an optical imaging system having a pupil;
- said method comprising the steps of;
defining said optical imaging system and a process to be utilized by said optical imaging system; defining a model equation representing the imaging performance of said optical imaging system and said process, said model equation including a calibrated pupil kernel; processing a target pattern utilizing said model equation so as to generate a simulated imaging result; wherein said calibrated pupil kernel represents a linear model of the pupil performance. - View Dependent Claims (5, 6)
- said method comprising the steps of;
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7. A computer readable medium bearing a computer program for generating a model for simulating the imaging performance of an optical imaging system having a pupil, the computer program, when executed, causing a computer to perform the steps of:
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defining said optical imaging system and a process to be utilized by said optical imaging system; and defining a model equation representing the imaging performance of said optical imaging system and said process, said model equation including a calibrated pupil kernel; wherein said calibrated pupil kernel represents a linear model of the pupil performance. - View Dependent Claims (8, 9)
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Specification