Micromirror device with a single address electrode
First Claim
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1. A micromirror device, comprising:
- a plurality of mirrors arranged on a substrate;
an elastic hinge for supporting each of said mirrors to be deflectable;
an electrode arranged on the substrate;
a driving circuit that is connected to said electrode or to said mirror via said elastic hinge, and controls a deflection of said mirror; and
a stopper provided in a position of making contact with said mirror in a deflected state of said mirror, whereina potential of said mirror or said stopper changes when said mirror makes contact with said stopper.
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Abstract
A micromirror device comprises a plurality of mirrors arranged on a substrate, an elastic hinge for supporting each mirror to be deflectable, an address electrode having first and second regions arranged across the deflection axis of each mirror, a driving circuit for controlling a deflection of the mirror, and a stopper provided in a position of making contact with the mirror in a deflected state of the mirror. When the mirror makes contact with the stopper, the potential of the mirror or the stopper changes.
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Citations
13 Claims
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1. A micromirror device, comprising:
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a plurality of mirrors arranged on a substrate; an elastic hinge for supporting each of said mirrors to be deflectable; an electrode arranged on the substrate; a driving circuit that is connected to said electrode or to said mirror via said elastic hinge, and controls a deflection of said mirror; and a stopper provided in a position of making contact with said mirror in a deflected state of said mirror, wherein a potential of said mirror or said stopper changes when said mirror makes contact with said stopper. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A micromirror device, comprising:
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a plurality of mirrors arranged on a substrate; an elastic hinge for supporting each of said mirrors to be deflectable; a potential change electrode which is arranged in a position of making contact with said mirror, and a potential of which changes along with said mirror when making contact with said mirror; and a driving circuit that is connected to said potential change electrode, and controls said mirror. - View Dependent Claims (8, 9, 10, 11, 12)
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13. A micromirror device, comprising:
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a plurality of mirrors arranged on a substrate; an elastic hinge for supporting each of said mirrors to be deflectable; an address electrode arranged between each of said mirrors and the substrate; a driving circuit connected to at least said address electrode, and to said mirror via said elastic hinge; and a potential change electrode which is arranged between each of said mirrors and the substrate, wherein a potential of any of said potential change electrode, said mirror, and said address electrode changes when said mirror makes contact with said potential change electrode.
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Specification