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Engineered fluoride-coated elements for laser systems

  • US 20080204862A1
  • Filed: 02/26/2008
  • Published: 08/28/2008
  • Est. Priority Date: 02/28/2007
  • Status: Active Grant
First Claim
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1. An element for use in wavelengths <

  • 200 nm laser systems, said element comprising;

    a substrate,one or a plurality of periods of fluoride coating materials, each of said periods comprising at least one layer of a high refractive index fluoride material and at least one layer of a low refractive fluoride material, andat least one layer of an amorphous SiO2 based material selected from the group consisting of silica, F-doped SiO2, N-doped SiO2 and Al2O3-doped SiO2 applied to on top of at least one of said periods of fluoride coating materials.wherein said high refractive index fluoride material has an index in the range of 1.65 to 1.75 and said low refractive fluoride material has an index in the range of 1.35 to 1.45; and

    and, optionally, a coating of an amorphous SiO2 material between the substrate and the first period of fluoride coating, the optional amorphous SiO2 material, when applied to said substrate, being in addition to the at least one layer of an amorphous SiO2 based material.

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