METHODS FOR ACCURATE IDENTIFICATION OF AN EDGE OF A CARE AREA FOR AN ARRAY AREA FORMED ON A WAFER AND METHODS FOR BINNING DEFECTS DETECTED IN AN ARRAY AREA FORMED ON A WAFER
First Claim
1. A computer-implemented method for identifying an edge of a care area for an array area formed on a wafer, comprising:
- determining a value for a difference image as a function of position from a position known to be inside the array area to a position known to be outside of the array area; and
identifying the position that is located closest to the inside of the array area and that has the value greater than a threshold as a position of the edge of the care area.
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Accused Products
Abstract
Methods for identifying an edge of a care area for an array area formed on a wafer and/or for binning defects detected in the array area are provided. One method for identifying an edge of a care area for an array area formed on a wafer includes determining a value for a difference image as a function of position from a position known to be inside the array area to a position known to be outside of the array area. The method also includes identifying the position that is located closest to the inside of the array area and that has the value greater than a threshold as a position of the edge of the care area.
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Citations
21 Claims
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1. A computer-implemented method for identifying an edge of a care area for an array area formed on a wafer, comprising:
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determining a value for a difference image as a function of position from a position known to be inside the array area to a position known to be outside of the array area; and identifying the position that is located closest to the inside of the array area and that has the value greater than a threshold as a position of the edge of the care area. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A computer-implemented method for identifying an edge of a care area for an array area formed on a wafer, comprising:
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determining a value for a difference image as a function of position from a position known to be inside the array area to a position known to be outside of the array area; determining if a repeating pattern is formed at each of the positions; and identifying the position that is located closest to the inside of the array area, that has the value greater than a threshold, and at which the repeating pattern is formed as a position of the edge of the care area. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16, 17, 18)
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19. A computer-implemented method for binning defects detected in an array area formed on a wafer, comprising:
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determining distances between positions of the defects and an edge of the array area; and binning the defects in groups such that the distances determined for the defects in each of the groups are at least similar. - View Dependent Claims (20, 21)
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Specification