CONTROL OF SLIT VALVE DOOR SEAL PRESSURE
First Claim
1. A slit valve assembly, comprising:
- a slit valve body comprising a first wall and a second wall; and
a slit valve door disposed within the slit valve body, the slit valve door comprising;
a sealing surface facing the first wall;
a bracing surface substantially parallel to the sealing surface facing the second wall, wherein the bracing surface is configured to extend away from the sealing surface; and
a gas supply configured to vary a sealing force on the sealing surface.
1 Assignment
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Accused Products
Abstract
Apparatuses and methods are provided for sealing a slit valve passage between two substrate processing chambers. A body with two openings to register with openings in the walls of the process chambers, and a passageway between them, houses a sealing member configured to extend and retract to block or open the passageway. The sealing member comprises a seal on one face that covers one opening, and a moveable lateral extension on the other face that braces against the other opening. The extension is actuated to contact the wall of the body, providing a bracing or sealing force to the seal on the other face of the sealing member. The sealing force may be adjusted by varying the gas pressure to the sealing member based on pressure conditions in the process chambers.
16 Citations
20 Claims
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1. A slit valve assembly, comprising:
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a slit valve body comprising a first wall and a second wall; and a slit valve door disposed within the slit valve body, the slit valve door comprising; a sealing surface facing the first wall; a bracing surface substantially parallel to the sealing surface facing the second wall, wherein the bracing surface is configured to extend away from the sealing surface; and a gas supply configured to vary a sealing force on the sealing surface. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. An apparatus for coupling two vacuum chambers together, comprising:
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a sealing member comprising a first face and a second face; a seal coupled to the first face; a moveable extension coupled to the second face; one or more lift rods coupled to the sealing member, each lift rod comprising a conduit in communication with the moveable extension; and a gas supply of adjustable pressure in communication with one or more of the conduits. - View Dependent Claims (9, 10, 11, 12, 13, 14)
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15. A method, comprising:
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disposing a slit valve door between a first chamber and a second chamber, the slit valve door having a sealing surface and a bracing surface substantially parallel to the sealing surface; supplying a gas of adjustable pressure between the sealing surface and the bracing surface to close the slit valve door; and adjusting a distance between the sealing surface and the bracing surface to control sealing force. - View Dependent Claims (16, 17, 18, 19, 20)
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Specification