MICROFABRICATED ELASTOMERIC VALVE AND PUMP SYSTEMS
First Claim
1. A microfabricated elastomeric structure, comprising:
- an elastomeric block formed with microfabricated recesses therein, a portion of the elastomeric block deflectable when the portion is actuated.
2 Assignments
0 Petitions
Accused Products
Abstract
A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.
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Citations
17 Claims
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1. A microfabricated elastomeric structure, comprising:
an elastomeric block formed with microfabricated recesses therein, a portion of the elastomeric block deflectable when the portion is actuated. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 15, 16, 17)
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11. A microfabricated elastomeric structure comprising:
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an elastomeric block; a first channel and a second channel separated by a separating portion of the elastomeric structure; and a microfabricated recess in the elastomeric block adjacent to the separating portion such that the separating portion may be actuated to deflect into the microfabricated recess. - View Dependent Claims (12, 13, 14)
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Specification