Circuit System With Supply Voltage For Driving An Electromechanical Switch
First Claim
1. A circuit for controlling operation of a load comprising:
- a MEMS switch positioned to place the load in one of a conducting state or a nonconducting state;
a piezoelectric transformer having a resonant frequency range with a resonant frequency and configured to provide a relatively high voltage output signal or a relatively low voltage output signal from output terminals thereof to control movement of the switch between a closed position, placing the load in the conducting state, and an open position, placing the load in the nonconducting state, the high voltage output signal including a frequency component in the resonant frequency range of the transformer; and
control circuitry for providing an input voltage signal to drive input terminals of the piezoelectric transformer to selectively provide the high voltage output signal or the low voltage output signal at the output terminals of the piezoelectric transformer.
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Accused Products
Abstract
A circuit for controlling operation of a load. In one example, a MEMS switch is positioned in the circuit to place the load in one of a conducting state or a nonconducting state. A piezoelectric transformer provides a relatively high voltage output signal or a relatively low voltage output signal to control movement of the switch between a closed position, placing the load in the conducting state, and an open position. The high voltage output signal includes a frequency component in the resonant frequency range of the transformer. Control circuitry provides an input voltage signal to the piezoelectric transformer to provide the high voltage output signal or the low voltage output signal at the output terminals of the piezoelectric transformer.
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Citations
32 Claims
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1. A circuit for controlling operation of a load comprising:
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a MEMS switch positioned to place the load in one of a conducting state or a nonconducting state; a piezoelectric transformer having a resonant frequency range with a resonant frequency and configured to provide a relatively high voltage output signal or a relatively low voltage output signal from output terminals thereof to control movement of the switch between a closed position, placing the load in the conducting state, and an open position, placing the load in the nonconducting state, the high voltage output signal including a frequency component in the resonant frequency range of the transformer; and control circuitry for providing an input voltage signal to drive input terminals of the piezoelectric transformer to selectively provide the high voltage output signal or the low voltage output signal at the output terminals of the piezoelectric transformer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A circuit for supplying a drive voltage to a MEMS switch of the type having a gate electrode for placing the state of the switch in a conducting or non-conducting state, comprising:
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a piezoelectric transformer having a characteristic resonant frequency with an output terminal of the transformer coupled to the gate electrode; drive circuitry coupled to energize the transformer with a first relatively low voltage signal having a frequency component different from the resonant frequency, the first signal having a first peak voltage, in order for the transformer to provide a second signal in response to the first signal, the second signal also having a frequency component different from the peak resonant frequency, the second signal having a second peak voltage greater than the first peak voltage; and rectifying circuitry coupled between the transformer output terminal and the gate electrode to convert the second signal into a rectified signal capable of changing the state of the MEMS switch. - View Dependent Claims (11)
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12. A method for controlling operation of a load comprising:
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forming a circuit with a MEMS switch positioned to place the load in one of a conducting state or a nonconducting state; positioning a piezoelectric transformer in the circuit, the transformer having a resonant frequency range with a peak resonant frequency; providing a relatively high voltage output signal or a relatively low voltage output signal from output terminals of a piezoelectric transformer to control movement of the switch between a closed position, placing the load in the conducting state, and an open position, placing the load in the nonconducting state, the high voltage output signal including a frequency component in the resonant frequency range of the transformer; and driving input terminals of the piezoelectric transformer according to a control signal to selectively provide the high voltage output signal or the low voltage output signal at the output terminals of the piezoelectric transformer. - View Dependent Claims (13, 14, 15, 16, 17)
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18. A system comprising
a circuit including a supply voltage, a load and an electromechanical switch having an element moveable to a first position which places the switch in a conducting mode and moveable to a second position which places the switch in a non-conducting mode, the switch further including a control terminal for selectively applying or removing an electrostatic force to place the element in the first position or in the second position; - and
a piezoelectric transformer having a high voltage terminal connected to the control terminal and a second terminal connected to receive an input signal so that with application of a first level signal to the second terminal the high voltage terminal provides a high voltage signal to the control terminal of sufficient voltage to generate an electrostatic field which displaces the element from one of the positions to the other position. - View Dependent Claims (19, 20, 21, 22, 23, 24)
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25. A method for optimizing rise and fall times of output voltages from a piezoelectric transformer coupled to drive a MEMS switch between conducting and nonconducting states, comprising the steps of:
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energizing the transformer with an input signal having a frequency that is offset with respect to the transformer'"'"'s resonant frequency to produce a high voltage output signal; rectifying the output signal; and applying the rectified signal to drive the MEMS switch from one of the conducting state and the nonconducting state to the other state. - View Dependent Claims (26, 27, 28, 29, 30, 31, 32)
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Specification